The molecular dynamics simulation of ion-induced ripple growth

P. Süle, K. H. Heinig

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The wavelength-dependence of ion-sputtering induced growth of repetitive nanostructures, such as ripples has been studied by molecular dynamics (MD) simulations in Si. The early stage of the ion erosion driven development of ripples has been simulated on prepatterned Si stripes with a wavy surface. The time evolution of the height function and amplitude of the sinusoidal surface profile has been followed by simulated ion-sputtering. According to Bradley-Harper (BH) theory, we expect correlation between the wavelength of ripples and the stability of them. However, we find that in the small ripple wavelength (λ) regime BH theory fails to reproduce the results obtained by molecular dynamics. We find that at short wavelengths (λ35 nm is stabilized in accordance with the available experimental results. According to the simulations, few hundreds of ion impacts in λ long and few nanometers wide Si ripples are sufficient for reaching saturation in surface growth for for λ>35 nm ripples. In another words, ripples in the long wavelength limit seems to be stable against ion-sputtering. A qualitative comparison of our simulation results with recent experimental data on nanopatterning under irradiation is attempted.

Original languageEnglish
Article number204704
JournalThe Journal of Chemical Physics
Volume131
Issue number20
DOIs
Publication statusPublished - 2009

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ripples
Molecular dynamics
Ions
molecular dynamics
Wavelength
Computer simulation
Sputtering
ions
simulation
wavelengths
sputtering
Erosion
ion impact
Nanostructures
Irradiation
erosion
saturation
irradiation
profiles

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physical and Theoretical Chemistry

Cite this

The molecular dynamics simulation of ion-induced ripple growth. / Süle, P.; Heinig, K. H.

In: The Journal of Chemical Physics, Vol. 131, No. 20, 204704, 2009.

Research output: Contribution to journalArticle

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