The kinetic growth model applied to micropipes in 6H-SiC

J. Heindl, W. Dorsch, R. Eckstein, D. Hofmann, T. Marek, St G. Müller, H. P. Strunk, A. Winnacker

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Abstract

In this study we investigated the as-grown {0001} Si surface of modified Lely-grown 6H-SiC using atomic force microscopy. We found micropipes that lie in the center of growth spirals whose radii ranged between 25 and 6000 nm. The screw component of the Burgers vector of the micropipe, which is synonymous with the total step height of the growth spiral, ranged from 1 to 25 unit-cells (1.5-37.5 nm). We fitted Frank's theory of hollow core dislocations, as modified by Cabrera and Levine concerning kinetic effects, to these experimental results and obtained values for surface energy and supersaturation at the inner side of the micropipe.

Original languageEnglish
Pages (from-to)1269-1271
Number of pages3
JournalDiamond and Related Materials
Volume6
Issue number10
DOIs
Publication statusPublished - Aug 1997

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Keywords

  • Growth model
  • Micropipes
  • Scanning force microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Heindl, J., Dorsch, W., Eckstein, R., Hofmann, D., Marek, T., Müller, S. G., Strunk, H. P., & Winnacker, A. (1997). The kinetic growth model applied to micropipes in 6H-SiC. Diamond and Related Materials, 6(10), 1269-1271. https://doi.org/10.1016/S0925-9635(97)00082-4