The interaction of hydrogen with the InP(100) substrates studied by AES, elastic peak electron spectroscopy (EPES) and EELS

A. Porte, B. Gruzza, C. A. Bondot, L. Bideux, C. Jardin, G. Gergely

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1 Citation (Scopus)

Abstract

The interaction of H2 and H+ with InP(100) surfaces was studied by AES, EELS and EPES (elastic peak electron spectroscopy) supply more information than AES (Auger electron spectroscopy) alone. EPES measures the intensity of the elastic peak; the signal magnitude is determined by the elastic scattering cross section and the inelastic mean free path. Dramatic changes in the EPES spectra were observed on InP(100) surface cleaned by Ar+ ion bombardment and then exposed to 70 L H2. For the evaluations of the EPES spectra, effective elastic scattering cross sections for a monolayer of H, C. P and In atoms were calculated for electron energies between E=50 and 300 eV range. AES and EPES spectra indicated enrichment of P in the surface layer, heating the ion etched sample to 473 K and exposing it to H2 resulted in the formation of a P monolayer on the surface, while the bombardment of the surface with H+ ions produced depletion of P in the surface layer. No experimental evidence was found using EELS (electron energy loss spectroscopy) and EPES for adsorption of H on the InP(100) surface.

Original languageEnglish
Pages (from-to)391-397
Number of pages7
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume68
Issue numberC
DOIs
Publication statusPublished - May 6 1994

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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