The interaction of gold thin films with InP

R. Veresegyházy, B. Pécz, I. Mojzes, G. Gombos

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The basic component of the most popular contacts to InP is gold. The interaction of gold with InP begins at low temperatures and is accompanied by the strong evaporation of phosphorus. The evaporation vs temperature curve is characterized by a multiple peak structure of the phosphorus loss. The peak structure is due to the formation of AuIn alloys with growing In content at higher temperatures, the formation and decomposition of a AuP compound and the melting of the metallization. Several samples were quenched at characteristic points of the evaporation vs temperature curve for further investigations. Scanning electron microscopy and Auger electron spectroscopic depth profiling of these samples showed changing surface morphology and increasing In content in the gold film in samples which were quenched subsequently at higher temperatures.

Original languageEnglish
Pages (from-to)189-191
Number of pages3
JournalVacuum
Volume40
Issue number1-2
DOIs
Publication statusPublished - 1990

Fingerprint

Gold
evaporation
gold
Thin films
phosphorus
thin films
Evaporation
Phosphorus
interactions
curves
Temperature
melting
Depth profiling
decomposition
Metallizing
scanning electron microscopy
temperature
Surface morphology
Melting
Decomposition

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Veresegyházy, R., Pécz, B., Mojzes, I., & Gombos, G. (1990). The interaction of gold thin films with InP. Vacuum, 40(1-2), 189-191. https://doi.org/10.1016/0042-207X(90)90153-P

The interaction of gold thin films with InP. / Veresegyházy, R.; Pécz, B.; Mojzes, I.; Gombos, G.

In: Vacuum, Vol. 40, No. 1-2, 1990, p. 189-191.

Research output: Contribution to journalArticle

Veresegyházy, R, Pécz, B, Mojzes, I & Gombos, G 1990, 'The interaction of gold thin films with InP', Vacuum, vol. 40, no. 1-2, pp. 189-191. https://doi.org/10.1016/0042-207X(90)90153-P
Veresegyházy, R. ; Pécz, B. ; Mojzes, I. ; Gombos, G. / The interaction of gold thin films with InP. In: Vacuum. 1990 ; Vol. 40, No. 1-2. pp. 189-191.
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