The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

I. Korolov, Aranka Derzsi, Z. Donkó, Julian Schulze

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur, J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.

Original languageEnglish
Article number064102
JournalApplied Physics Letters
Volume103
Issue number6
DOIs
Publication statusPublished - Aug 5 2013

Fingerprint

asymmetry
electrons
trajectory control
harmonics
secondary emission
plasma frequencies
electrode materials
electron emission
radio frequencies
phase shift
electrodes
coefficients
ions
energy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas. / Korolov, I.; Derzsi, Aranka; Donkó, Z.; Schulze, Julian.

In: Applied Physics Letters, Vol. 103, No. 6, 064102, 05.08.2013.

Research output: Contribution to journalArticle

@article{d69cc0899d8a4ed38a1f4d36c00c82a6,
title = "The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas",
abstract = "In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur, J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.",
author = "I. Korolov and Aranka Derzsi and Z. Donk{\'o} and Julian Schulze",
year = "2013",
month = "8",
day = "5",
doi = "10.1063/1.4817920",
language = "English",
volume = "103",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "6",

}

TY - JOUR

T1 - The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

AU - Korolov, I.

AU - Derzsi, Aranka

AU - Donkó, Z.

AU - Schulze, Julian

PY - 2013/8/5

Y1 - 2013/8/5

N2 - In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur, J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.

AB - In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur, J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.

UR - http://www.scopus.com/inward/record.url?scp=84881630435&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84881630435&partnerID=8YFLogxK

U2 - 10.1063/1.4817920

DO - 10.1063/1.4817920

M3 - Article

AN - SCOPUS:84881630435

VL - 103

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 6

M1 - 064102

ER -