The influence of particulate size on the formation of polytetrafluoroethylene thin films during pulsed laser deposition

Research output: Contribution to journalConference article

Abstract

The lowest thickness of contiguous polytetrafiuoroethylene (PTFE) thin films prepared by pulsed laser deposition is influenced by the size of the particulates emitted from the target. Since the particulates reach the substrate at random, by the time a contiguous layer is formed its average thickness can be several times as much as the mean size of the particulates. During our experiments the size distribution of the particulates emitted during ArF excimer laser deposition from pressed PTFE pellets was studied as the function of the applied ablating fluence in the range of 1.1-6.2 J/cm2. The size distribution of the particulates could be described with a first order exponential decay function. The value of the decay constant varied between 3.94 and 6.15 depending on the laser fluence. With the knowledge of the size distribution of the depositing particulates a theoretical model was used for simulating the growth of the thin film. The minimum number of the pulses required to obtain a contiguous layer and its thickness could be estimated. The thinnest layer could be obtained at the lowest investigated fluence.

Original languageEnglish
Pages (from-to)274-278
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5131
DOIs
Publication statusPublished - Dec 1 2002
EventThird GR-I International Conference on New Laser Technologies and Applications - Patras, Greece
Duration: Sep 5 2002Sep 8 2002

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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