The ideal vehicle for optical model development: Porous silicon multilayers

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7 Citations (Scopus)


A proprietary field emission scanning electron microscopy (FESEM) image analysis method is proposed to support the optical modelling of spectroscopic ellipsometry data evaluation of complex porous silicon multilayer stacks (PSM). Sample structure was a 27-layer Fabry-Perot type PSM stack, which consists of nominally λ0/4 (optical thickness) layers of high and low refractive indices (low and high porosity). Two types of optical models were adopted (derived from FESEM imaging): one considering step-like, abrupt interfaces and another one taking gradual transitions between the layers of high and low index of refraction into account. The results suggest that there is no sense to refine the optical models beyond any limit, when the uncertainties given by the tolerances involved in the interface determination of this random PSM structure do not justify the efforts any more.

Original languageEnglish
Pages (from-to)535-539
Number of pages5
JournalThin Solid Films
Publication statusPublished - May 1 2004
EventThe 3rd International Conference on Spectroscopic Ellipsometry - Vienna, Austria
Duration: Jul 6 2003Jul 11 2003


  • Interface roughness
  • Multilayer modelling
  • Porous silicon
  • Spectroscopic ellipsometry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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