The semiconductor industry had already entered the nanotechnology world in 2000 with the introduction of the 130-nm node with a 70-nm gate-length feature size, followed by the 90-nm node featuring a critical dimension of 50 nm in 2002. Reviewing the lessons learned in the semiconductor industry over the past few decades can help in better understanding the confusing array of technologies that are beginning to emerge from the research community. This experience suggests some criteria needed to bring these research efforts into the realm of high-volume manufacturing.
ASJC Scopus subject areas
- Computer Science(all)