The elastic peak in AES and EELS

Research output: Contribution to journalArticle

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Abstract

Elastic peak electron spectroscopy (EPES) determines the spectra of secondary electrons in absolute units in the vicinity of the elastic peak including also loss peaks. The percentage of elastically reflected electrons Ne is determined by comparing the peak to total spectrum area. Quantitative data can be deduced from the measurement of the coefficient of secondary emission or electron reflection. Ne is mainly determined by the atomic number for medium energy excitation (1-3.2 keV). It can be used as reference for quantitative AES or EELS. This paper deals with the application of EPES. Results obtained on the backscattering cross section of C, Si, Ge, Mo, W and Au are presented. The K core level ionization cross section of carbon was determined. The volume plasmon loss process is discussed. EPES was used for evaluating some experimental results on the excitation cross section of a silicon surface state and vibrations of CO adsorbed on Pt have also been determined.

Original languageEnglish
Pages (from-to)89-91
Number of pages3
JournalVacuum
Volume33
Issue number1-2
DOIs
Publication statusPublished - 1983

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Electron spectroscopy
Electron energy loss spectroscopy
Electron reflection
Secondary emission
electron spectroscopy
Core levels
Electrons
Excitation energy
Surface states
Silicon
Backscattering
Carbon Monoxide
Ionization
Carbon
electrons
cross sections
ionization cross sections
secondary emission
excitation
backscattering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

The elastic peak in AES and EELS. / Gergely, G.

In: Vacuum, Vol. 33, No. 1-2, 1983, p. 89-91.

Research output: Contribution to journalArticle

Gergely, G. / The elastic peak in AES and EELS. In: Vacuum. 1983 ; Vol. 33, No. 1-2. pp. 89-91.
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