The elastic peak in AES and EELS

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Elastic peak electron spectroscopy (EPES) determines the spectra of secondary electrons in absolute units in the vicinity of the elastic peak including also loss peaks. The percentage of elastically reflected electrons Ne is determined by comparing the peak to total spectrum area. Quantitative data can be deduced from the measurement of the coefficient of secondary emission or electron reflection. Ne is mainly determined by the atomic number for medium energy excitation (1-3.2 keV). It can be used as reference for quantitative AES or EELS. This paper deals with the application of EPES. Results obtained on the backscattering cross section of C, Si, Ge, Mo, W and Au are presented. The K core level ionization cross section of carbon was determined. The volume plasmon loss process is discussed. EPES was used for evaluating some experimental results on the excitation cross section of a silicon surface state and vibrations of CO adsorbed on Pt have also been determined.

Original languageEnglish
Pages (from-to)89-91
Number of pages3
Issue number1-2
Publication statusPublished - Jan 1 1983


ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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