The effect of process parameters on the O/Mo ratio in laser deposition of molybdenum oxides from aqueous solutions

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Abstract

A study on precursor concentration (0.0075-0.050M), laser power (up to 210 mW) and scanning speed (from 0.15 to 1 mm/s) dependence of chemical composition of patterns deposited by pyrolytic laser decomposition of ammonium heptamolybdate is reported. Although the deposition parameters are varied over several orders of magnitude, the chemical composition of the deposits, as determined by energy and wavelength dispersive X-ray analyses, hardly varies. On setting low-temperature processing by applying either low power or high scanning speed, the oxidation state of molybdenum in the precursor is preserved, resulting in deposition of oxides of composition near to MoO3. Using high power and low scanning speed, on the other hand, the attained higher temperatures initiate decomposition of ammonia, leading to partial reduction and yielding deposits of near-MoO2 composition.

Original languageEnglish
Pages (from-to)500-503
Number of pages4
JournalApplied Surface Science
Volume86
Issue number1-4
DOIs
Publication statusPublished - 1995

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Molybdenum oxide
molybdenum oxides
laser deposition
aqueous solutions
scanning
Lasers
chemical composition
Scanning
Chemical analysis
deposits
decomposition
Deposits
Decomposition
molybdenum
lasers
Molybdenum
ammonia
Ammonia
Oxides
oxidation

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physical and Theoretical Chemistry
  • Condensed Matter Physics

Cite this

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title = "The effect of process parameters on the O/Mo ratio in laser deposition of molybdenum oxides from aqueous solutions",
abstract = "A study on precursor concentration (0.0075-0.050M), laser power (up to 210 mW) and scanning speed (from 0.15 to 1 mm/s) dependence of chemical composition of patterns deposited by pyrolytic laser decomposition of ammonium heptamolybdate is reported. Although the deposition parameters are varied over several orders of magnitude, the chemical composition of the deposits, as determined by energy and wavelength dispersive X-ray analyses, hardly varies. On setting low-temperature processing by applying either low power or high scanning speed, the oxidation state of molybdenum in the precursor is preserved, resulting in deposition of oxides of composition near to MoO3. Using high power and low scanning speed, on the other hand, the attained higher temperatures initiate decomposition of ammonia, leading to partial reduction and yielding deposits of near-MoO2 composition.",
author = "K. Bali and Z. Geretovszky and A. T{\'o}th and T. Sz{\"o}r{\'e}nyi",
year = "1995",
doi = "10.1016/0169-4332(94)00437-4",
language = "English",
volume = "86",
pages = "500--503",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "1-4",

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TY - JOUR

T1 - The effect of process parameters on the O/Mo ratio in laser deposition of molybdenum oxides from aqueous solutions

AU - Bali, K.

AU - Geretovszky, Z.

AU - Tóth, A.

AU - Szörényi, T.

PY - 1995

Y1 - 1995

N2 - A study on precursor concentration (0.0075-0.050M), laser power (up to 210 mW) and scanning speed (from 0.15 to 1 mm/s) dependence of chemical composition of patterns deposited by pyrolytic laser decomposition of ammonium heptamolybdate is reported. Although the deposition parameters are varied over several orders of magnitude, the chemical composition of the deposits, as determined by energy and wavelength dispersive X-ray analyses, hardly varies. On setting low-temperature processing by applying either low power or high scanning speed, the oxidation state of molybdenum in the precursor is preserved, resulting in deposition of oxides of composition near to MoO3. Using high power and low scanning speed, on the other hand, the attained higher temperatures initiate decomposition of ammonia, leading to partial reduction and yielding deposits of near-MoO2 composition.

AB - A study on precursor concentration (0.0075-0.050M), laser power (up to 210 mW) and scanning speed (from 0.15 to 1 mm/s) dependence of chemical composition of patterns deposited by pyrolytic laser decomposition of ammonium heptamolybdate is reported. Although the deposition parameters are varied over several orders of magnitude, the chemical composition of the deposits, as determined by energy and wavelength dispersive X-ray analyses, hardly varies. On setting low-temperature processing by applying either low power or high scanning speed, the oxidation state of molybdenum in the precursor is preserved, resulting in deposition of oxides of composition near to MoO3. Using high power and low scanning speed, on the other hand, the attained higher temperatures initiate decomposition of ammonia, leading to partial reduction and yielding deposits of near-MoO2 composition.

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