The effect of inhomogeneous substrate-temperature distribution on the signal response of oxygen sensors

Josef Gerblinger, Harald Gabler, Randolf Mock, Hans Meixner

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Temperature has a major influence on the electrical conductivity and response times of high-speed oxygen sensors comprising thin, sputtered films of semiconductive metal oxides such as SrTiO3. As it is undesirable in the majority of applications, the temperature sensitivity is usually eliminated by incorporating a heating element in the sensor in order to maintain a constant temperature. A homogeneous temperature distribution across the sensitive film is crucial for the reproducibility of the sensor signals and can be achieved by calculating the geometry of the heating element with the aid of the finite element method. The temperature distributions calculated in this way can be verified by thermographic and IR photography.

Original languageEnglish
Pages (from-to)396-400
Number of pages5
JournalSensors and Actuators: B. Chemical
Volume16
Issue number1-3
DOIs
Publication statusPublished - Oct 1993

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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