The effect of heat treatment on spin-on oxide glasses in solar cell application

Eniko Bandy, Arpad Foldvary, Marta Rencz

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1 Citation (Scopus)

Abstract

This paper studies the typical solar cell applications of spin-on silicate glass layers (Filmtronics Inc. 15A and 20B) in function of the applied heat treatment. The masking capability in wet etching procedures, like surface texturing and long-time anisotropic etching used in semitransparent solar cells, and also the surface passivation characteristics of p-type surfaces were examined. Optical microscopy inspections sustain the suitability in wet etching procedures of different temperature cured SOG layers. The best masking results in long-time anisotropic etching were gained for 800°C, N2 gas cured 20B layer. Microwave induced photoconductive decay (μ-PCD) measurements were conducted to reveal the lifetime changes that occur compared to raw material of differently passivated samples: Si3N4, SiO2 and spin-on glass layers cured at distinct temperatures. The measurements confirm a significant lifetime increase reached in case of 800°C, O2 gas cured 15A layer.

Original languageEnglish
Pages297-300
Number of pages4
DOIs
Publication statusPublished - Jan 1 2013
Event19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013 - Berlin, Germany
Duration: Sep 25 2013Sep 27 2013

Other

Other19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013
CountryGermany
CityBerlin
Period9/25/139/27/13

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ASJC Scopus subject areas

  • Hardware and Architecture

Cite this

Bandy, E., Foldvary, A., & Rencz, M. (2013). The effect of heat treatment on spin-on oxide glasses in solar cell application. 297-300. Paper presented at 19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013, Berlin, Germany. https://doi.org/10.1109/THERMINIC.2013.6675238