The combined effect of laser fluence and target deterioration in determining the chemical composition of pulsed laser deposited boron carbide films

T. Szörényi, J. P. Stoquert, F. Antoni, E. Fogarassy

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A series of boron carbide films of 180 ± 30 nm thickness has been deposited by KrF excimer laser ablation of a sintered B4C target in high vacuum. Rutherford backscattering spectroscopy revealed that the chemical composition of the films grown on Si substrates, at room temperature, at laser fluences tuned between 2 and 14.3 J cm-2 varied depending not only on the actual laser fluence but also on the past record of the B4C target. Parallel SEM mapping of both film and target surfaces pointed to a correlation between changes in film composition, droplet density and target surface deterioration. This correlation is discussed in detail.

Original languageEnglish
Pages (from-to)127-131
Number of pages5
JournalSurface and Coatings Technology
Volume180-181
DOIs
Publication statusPublished - Mar 1 2004

Fingerprint

Boron carbide
boron carbides
Pulsed lasers
deterioration
Deterioration
pulsed lasers
fluence
chemical composition
Lasers
Chemical analysis
lasers
Rutherford backscattering spectroscopy
Excimer lasers
Laser ablation
high vacuum
excimer lasers
laser ablation
backscattering
Vacuum
Scanning electron microscopy

Keywords

  • Boron carbide
  • Pulsed laser deposition
  • Surface deterioration
  • Thin films

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

The combined effect of laser fluence and target deterioration in determining the chemical composition of pulsed laser deposited boron carbide films. / Szörényi, T.; Stoquert, J. P.; Antoni, F.; Fogarassy, E.

In: Surface and Coatings Technology, Vol. 180-181, 01.03.2004, p. 127-131.

Research output: Contribution to journalArticle

@article{50e35521351b421ca80875e054ddc5ae,
title = "The combined effect of laser fluence and target deterioration in determining the chemical composition of pulsed laser deposited boron carbide films",
abstract = "A series of boron carbide films of 180 ± 30 nm thickness has been deposited by KrF excimer laser ablation of a sintered B4C target in high vacuum. Rutherford backscattering spectroscopy revealed that the chemical composition of the films grown on Si substrates, at room temperature, at laser fluences tuned between 2 and 14.3 J cm-2 varied depending not only on the actual laser fluence but also on the past record of the B4C target. Parallel SEM mapping of both film and target surfaces pointed to a correlation between changes in film composition, droplet density and target surface deterioration. This correlation is discussed in detail.",
keywords = "Boron carbide, Pulsed laser deposition, Surface deterioration, Thin films",
author = "T. Sz{\"o}r{\'e}nyi and Stoquert, {J. P.} and F. Antoni and E. Fogarassy",
year = "2004",
month = "3",
day = "1",
doi = "10.1016/j.surfcoat.2003.10.049",
language = "English",
volume = "180-181",
pages = "127--131",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",

}

TY - JOUR

T1 - The combined effect of laser fluence and target deterioration in determining the chemical composition of pulsed laser deposited boron carbide films

AU - Szörényi, T.

AU - Stoquert, J. P.

AU - Antoni, F.

AU - Fogarassy, E.

PY - 2004/3/1

Y1 - 2004/3/1

N2 - A series of boron carbide films of 180 ± 30 nm thickness has been deposited by KrF excimer laser ablation of a sintered B4C target in high vacuum. Rutherford backscattering spectroscopy revealed that the chemical composition of the films grown on Si substrates, at room temperature, at laser fluences tuned between 2 and 14.3 J cm-2 varied depending not only on the actual laser fluence but also on the past record of the B4C target. Parallel SEM mapping of both film and target surfaces pointed to a correlation between changes in film composition, droplet density and target surface deterioration. This correlation is discussed in detail.

AB - A series of boron carbide films of 180 ± 30 nm thickness has been deposited by KrF excimer laser ablation of a sintered B4C target in high vacuum. Rutherford backscattering spectroscopy revealed that the chemical composition of the films grown on Si substrates, at room temperature, at laser fluences tuned between 2 and 14.3 J cm-2 varied depending not only on the actual laser fluence but also on the past record of the B4C target. Parallel SEM mapping of both film and target surfaces pointed to a correlation between changes in film composition, droplet density and target surface deterioration. This correlation is discussed in detail.

KW - Boron carbide

KW - Pulsed laser deposition

KW - Surface deterioration

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=16744368323&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=16744368323&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2003.10.049

DO - 10.1016/j.surfcoat.2003.10.049

M3 - Article

AN - SCOPUS:16744368323

VL - 180-181

SP - 127

EP - 131

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

ER -