The combined effect of laser fluence and target deterioration in determining the chemical composition of pulsed laser deposited boron carbide films

T. Szörényi, J. P. Stoquert, F. Antoni, E. Fogarassy

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A series of boron carbide films of 180 ± 30 nm thickness has been deposited by KrF excimer laser ablation of a sintered B4C target in high vacuum. Rutherford backscattering spectroscopy revealed that the chemical composition of the films grown on Si substrates, at room temperature, at laser fluences tuned between 2 and 14.3 J cm-2 varied depending not only on the actual laser fluence but also on the past record of the B4C target. Parallel SEM mapping of both film and target surfaces pointed to a correlation between changes in film composition, droplet density and target surface deterioration. This correlation is discussed in detail.

Original languageEnglish
Pages (from-to)127-131
Number of pages5
JournalSurface and Coatings Technology
Volume180-181
DOIs
Publication statusPublished - Mar 1 2004

Keywords

  • Boron carbide
  • Pulsed laser deposition
  • Surface deterioration
  • Thin films

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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