TEM study of Ni and Ni2Si ohmic contacts to SiC

B. Pécz, G. Radnóczi, S. Cassette, C. Brylinski, C. Arnodo, O. Noblanc

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

The structure of Ni and Si/Ni contacts to SiC was studied by transmission electron microscopy. Annealed Ni/SiC contacts showed ohmic behaviour, but Ni proved to be reactive with SiC resulting in the formation of nickel suicide together with the formation of a high number of voids. Deposition and annealing of Si/Ni multilayer contacts resulted in a void free Ni2Si contact 0layer on SiC, while also exhibiting low contact resistivity.

Original languageEnglish
Pages (from-to)1428-1431
Number of pages4
JournalDiamond and Related Materials
Volume6
Issue number10
Publication statusPublished - Aug 1997

Fingerprint

Ohmic contacts
Nickel
voids
electric contacts
Multilayers
Annealing
Transmission electron microscopy
transmission electron microscopy
nickel
electrical resistivity
annealing

Keywords

  • Electron microscopy
  • Ohmic contacts
  • Silicon carbide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Pécz, B., Radnóczi, G., Cassette, S., Brylinski, C., Arnodo, C., & Noblanc, O. (1997). TEM study of Ni and Ni2Si ohmic contacts to SiC. Diamond and Related Materials, 6(10), 1428-1431.

TEM study of Ni and Ni2Si ohmic contacts to SiC. / Pécz, B.; Radnóczi, G.; Cassette, S.; Brylinski, C.; Arnodo, C.; Noblanc, O.

In: Diamond and Related Materials, Vol. 6, No. 10, 08.1997, p. 1428-1431.

Research output: Contribution to journalArticle

Pécz, B, Radnóczi, G, Cassette, S, Brylinski, C, Arnodo, C & Noblanc, O 1997, 'TEM study of Ni and Ni2Si ohmic contacts to SiC', Diamond and Related Materials, vol. 6, no. 10, pp. 1428-1431.
Pécz B, Radnóczi G, Cassette S, Brylinski C, Arnodo C, Noblanc O. TEM study of Ni and Ni2Si ohmic contacts to SiC. Diamond and Related Materials. 1997 Aug;6(10):1428-1431.
Pécz, B. ; Radnóczi, G. ; Cassette, S. ; Brylinski, C. ; Arnodo, C. ; Noblanc, O. / TEM study of Ni and Ni2Si ohmic contacts to SiC. In: Diamond and Related Materials. 1997 ; Vol. 6, No. 10. pp. 1428-1431.
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