TEM sample preparation by ion milling/amorphization

Research output: Contribution to journalArticle

74 Citations (Scopus)

Abstract

Artefacts evolved during TEM sample preparation by ion milling are discussed. Possibilities are given to minimise the amorphization/damage of the ion milled samples. A new type of low energy ion gun is applied in the ion milling device; ion beam induced artefacts are minimised, as shown for samples of GaAs and Si.

Original languageEnglish
Pages (from-to)267-276
Number of pages10
JournalMicron
Volume30
Issue number3
DOIs
Publication statusPublished - Jun 1999

Fingerprint

Amorphization
Ions
Transmission electron microscopy
preparation
transmission electron microscopy
artifacts
ions
Artifacts
Ion sources
Ion beams
Firearms
ion beams
damage
Equipment and Supplies
energy

Keywords

  • Amorphization
  • Damage
  • Electron microscopy
  • Ion gun
  • Ion milling

ASJC Scopus subject areas

  • Cell Biology
  • Materials Science(all)
  • Instrumentation

Cite this

TEM sample preparation by ion milling/amorphization. / Barna, A.; Pécz, B.; Menyhárd, M.

In: Micron, Vol. 30, No. 3, 06.1999, p. 267-276.

Research output: Contribution to journalArticle

@article{0869b18fa9b7481aa1f0a8882b704516,
title = "TEM sample preparation by ion milling/amorphization",
abstract = "Artefacts evolved during TEM sample preparation by ion milling are discussed. Possibilities are given to minimise the amorphization/damage of the ion milled samples. A new type of low energy ion gun is applied in the ion milling device; ion beam induced artefacts are minimised, as shown for samples of GaAs and Si.",
keywords = "Amorphization, Damage, Electron microscopy, Ion gun, Ion milling",
author = "A. Barna and B. P{\'e}cz and M. Menyh{\'a}rd",
year = "1999",
month = "6",
doi = "10.1016/S0968-4328(99)00011-6",
language = "English",
volume = "30",
pages = "267--276",
journal = "Micron",
issn = "0968-4328",
publisher = "Elsevier Limited",
number = "3",

}

TY - JOUR

T1 - TEM sample preparation by ion milling/amorphization

AU - Barna, A.

AU - Pécz, B.

AU - Menyhárd, M.

PY - 1999/6

Y1 - 1999/6

N2 - Artefacts evolved during TEM sample preparation by ion milling are discussed. Possibilities are given to minimise the amorphization/damage of the ion milled samples. A new type of low energy ion gun is applied in the ion milling device; ion beam induced artefacts are minimised, as shown for samples of GaAs and Si.

AB - Artefacts evolved during TEM sample preparation by ion milling are discussed. Possibilities are given to minimise the amorphization/damage of the ion milled samples. A new type of low energy ion gun is applied in the ion milling device; ion beam induced artefacts are minimised, as shown for samples of GaAs and Si.

KW - Amorphization

KW - Damage

KW - Electron microscopy

KW - Ion gun

KW - Ion milling

UR - http://www.scopus.com/inward/record.url?scp=0345711496&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0345711496&partnerID=8YFLogxK

U2 - 10.1016/S0968-4328(99)00011-6

DO - 10.1016/S0968-4328(99)00011-6

M3 - Article

VL - 30

SP - 267

EP - 276

JO - Micron

JF - Micron

SN - 0968-4328

IS - 3

ER -