Synthesis of silicon nitride powders in an RF plasma torch, and studies of their sintering behaviour

J. Szépvölgyi, I. Mohai-Toth, I. Bertóti, E. Gilbart, F. L. Riley

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

Nanosized Si3N4 powders have been produced from SiCl4 and NH3 in an RF plasma torch of special geometry. The experiments were aimed at studying relationships between synthesis parameters, and nitrogen content and yield of Si3N4 powders. Synthesis parameters included plasma power, flow rate of sheath gas, and feed rates of reagents. Powders were characterized in terms of chemical composition, surface chemistry, crystallinity and of specific surface area. Sintering behaviour in the presence of an MgO-Y2O3 dopant system was assessed by using controlled atmosphere pressureless sintering and uniaxial hot-pressing. Sintered materials were examined by XRD, TEM and XPS. Mechanical properties were evaluated on the basis of microhardness and critical fracture toughness. This paper presents an overview of this investigation and evaluates the results.

Original languageEnglish
Title of host publicationKey Engineering Materials
PublisherPubl by Trans Tech Publ
Pages35-40
Number of pages6
Volume89-91
ISBN (Print)0878496688
Publication statusPublished - 1994
EventProceedings of the International Conference on Silicon Nitride-Based Ceramics - Stuttgart, Ger
Duration: Oct 4 1993Oct 6 1993

Other

OtherProceedings of the International Conference on Silicon Nitride-Based Ceramics
CityStuttgart, Ger
Period10/4/9310/6/93

Fingerprint

Plasma torches
Silicon nitride
Sintering
Powders
Plasma sheaths
Hot pressing
Surface chemistry
Specific surface area
Microhardness
Fracture toughness
X ray photoelectron spectroscopy
Doping (additives)
Flow rate
Protective atmospheres
Transmission electron microscopy
Nitrogen
Plasmas
Mechanical properties
Geometry
Chemical analysis

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Szépvölgyi, J., Mohai-Toth, I., Bertóti, I., Gilbart, E., & Riley, F. L. (1994). Synthesis of silicon nitride powders in an RF plasma torch, and studies of their sintering behaviour. In Key Engineering Materials (Vol. 89-91, pp. 35-40). Publ by Trans Tech Publ.

Synthesis of silicon nitride powders in an RF plasma torch, and studies of their sintering behaviour. / Szépvölgyi, J.; Mohai-Toth, I.; Bertóti, I.; Gilbart, E.; Riley, F. L.

Key Engineering Materials. Vol. 89-91 Publ by Trans Tech Publ, 1994. p. 35-40.

Research output: Chapter in Book/Report/Conference proceedingChapter

Szépvölgyi, J, Mohai-Toth, I, Bertóti, I, Gilbart, E & Riley, FL 1994, Synthesis of silicon nitride powders in an RF plasma torch, and studies of their sintering behaviour. in Key Engineering Materials. vol. 89-91, Publ by Trans Tech Publ, pp. 35-40, Proceedings of the International Conference on Silicon Nitride-Based Ceramics, Stuttgart, Ger, 10/4/93.
Szépvölgyi J, Mohai-Toth I, Bertóti I, Gilbart E, Riley FL. Synthesis of silicon nitride powders in an RF plasma torch, and studies of their sintering behaviour. In Key Engineering Materials. Vol. 89-91. Publ by Trans Tech Publ. 1994. p. 35-40
Szépvölgyi, J. ; Mohai-Toth, I. ; Bertóti, I. ; Gilbart, E. ; Riley, F. L. / Synthesis of silicon nitride powders in an RF plasma torch, and studies of their sintering behaviour. Key Engineering Materials. Vol. 89-91 Publ by Trans Tech Publ, 1994. pp. 35-40
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