Synthesis of phosphorus-carbide thin films by magnetron sputtering

A. Furlan, G. K. Gueorguiev, Zs Czigány, H. Högberg, S. Braun, S. Stafström, L. Hultman

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

Phosphorus-carbide, CPx (0.025 ≤ × ≤ 0.1), thin films have been synthesized by magnetron sputtering from pressed graphite-phosphorus targets. The films were characterized by X-ray photoelectron spectroscopy, transmission electron microscopy and diffraction, and nanoindentation. CP0.1 exhibits C-P bonding in an amorphous structure with elements of curved graphene planes, yielding a material with unique short range order. These features are consistent with what has been predicted by our results of theoretically modeled synthetic growth of CPx. The films are mechanically resilient with hardness up to 24 GPa and elastic recovery up to 72%.

Original languageEnglish
Pages (from-to)191-193
Number of pages3
JournalPhysica Status Solidi - Rapid Research Letters
Volume2
Issue number4
DOIs
Publication statusPublished - Aug 1 2008

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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    Furlan, A., Gueorguiev, G. K., Czigány, Z., Högberg, H., Braun, S., Stafström, S., & Hultman, L. (2008). Synthesis of phosphorus-carbide thin films by magnetron sputtering. Physica Status Solidi - Rapid Research Letters, 2(4), 191-193. https://doi.org/10.1002/pssr.200802077