Swift heavy ion irradiation effects in SiC measured by positrons

L. Liszkay, K. Havancsák, M. F. Barthe, P. Desgardin, L. Henry, Z. Kajcsos, G. Battistig, E. Szilágyi, V. A. Skuratov

Research output: Contribution to journalArticle

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Abstract

N-type 6H SiC single crystals irradiated with swift (246 MeV) Kr ions at room temperature (the implantation depth being 21 μm) were investigated by conventional positron lifetime and Doppler-broadening measurements as well as with the application of a slow positron beam. The fluence dependence of the irradiation-induced defects was studied in the 1×1010 - 1×1014 ion cm-2 range. In the fluence and depth range studied, no sign of amorphization (or creation of large voids) was seen in the Kr irradiated crystals. The positron annihilation results were compared with atomic displacement calculations by TRIM. A simple model was used to describe the trapping effect and determine the relationship between the atomic displacement densities and the positron trapping. The 225 ps lifetime of the open-volume defects created suggests that the VSi-VC divacancy is the dominant trapping site in the implanted zone.

Original languageEnglish
Pages (from-to)123-125
Number of pages3
JournalMaterials Science Forum
Volume363-365
Publication statusPublished - 2001

Fingerprint

Heavy Ions
Positrons
Ion bombardment
ion irradiation
Heavy ions
positrons
heavy ions
trapping
fluence
Ions
life (durability)
Defects
Positron annihilation
Amorphization
Doppler effect
defects
positron annihilation
Ion implantation
voids
implantation

Keywords

  • Amorphization
  • Defect profile
  • Ion implantation
  • Irradiation
  • Semiconductors
  • Si
  • SiC
  • Swift ions
  • TRIM

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Liszkay, L., Havancsák, K., Barthe, M. F., Desgardin, P., Henry, L., Kajcsos, Z., ... Skuratov, V. A. (2001). Swift heavy ion irradiation effects in SiC measured by positrons. Materials Science Forum, 363-365, 123-125.

Swift heavy ion irradiation effects in SiC measured by positrons. / Liszkay, L.; Havancsák, K.; Barthe, M. F.; Desgardin, P.; Henry, L.; Kajcsos, Z.; Battistig, G.; Szilágyi, E.; Skuratov, V. A.

In: Materials Science Forum, Vol. 363-365, 2001, p. 123-125.

Research output: Contribution to journalArticle

Liszkay, L, Havancsák, K, Barthe, MF, Desgardin, P, Henry, L, Kajcsos, Z, Battistig, G, Szilágyi, E & Skuratov, VA 2001, 'Swift heavy ion irradiation effects in SiC measured by positrons', Materials Science Forum, vol. 363-365, pp. 123-125.
Liszkay L, Havancsák K, Barthe MF, Desgardin P, Henry L, Kajcsos Z et al. Swift heavy ion irradiation effects in SiC measured by positrons. Materials Science Forum. 2001;363-365:123-125.
Liszkay, L. ; Havancsák, K. ; Barthe, M. F. ; Desgardin, P. ; Henry, L. ; Kajcsos, Z. ; Battistig, G. ; Szilágyi, E. ; Skuratov, V. A. / Swift heavy ion irradiation effects in SiC measured by positrons. In: Materials Science Forum. 2001 ; Vol. 363-365. pp. 123-125.
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