Surface potential mapping

comparison of the vibrating capacitor and the SPV method

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Surface potential maps are very important for characterisation of insulator covered and bare semiconductor surfaces. Contactless methods use capacitive coupling. Vibration (vibrating capacitor) and light (SPV, surface photo voltage method) are used for the surface excitation. Both methods give information about the surface potential, and are sensitive to the surface charge, too. This article discusses the differences and similarities between the methods, concerning theory, application and evaluation of the results. Several surface potential maps are presented and evaluated too.

Original languageEnglish
Pages (from-to)509-513
Number of pages5
JournalSolid-State Electronics
Volume44
Issue number3
DOIs
Publication statusPublished - Mar 1 2000

Fingerprint

Surface potential
capacitors
Capacitors
Electric potential
electric potential
Surface charge
Semiconductor materials
insulators
vibration
evaluation
excitation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Surface potential mapping : comparison of the vibrating capacitor and the SPV method. / Mizsei, J.

In: Solid-State Electronics, Vol. 44, No. 3, 01.03.2000, p. 509-513.

Research output: Contribution to journalArticle

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