Surface polishing and slope cut by parallel ar ion beams for high resolution electron backscatter diffraction measurements

Zs Radi, K. Havancsak, Sz Kalacska, A. Baris

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

For the large majority of materials science studies a good quality surface is extremely important. Especially, it is of great importance in case of electron backscatter diffraction (EBSD) where the information depth is as shallow as some tens of nanometres and this is the reason why this analytical method requires a damage- and oxide-free sample surface. The SC-1000 SEMPrep dual Ar ion beam workstation developed by Technoorg Linda Ltd., Hungary, is suitable for both surface polishing and slope cutting of solid state samples, preparing high-quality surfaces. These surfaces allow several types of SEM investigations including the surface sensitive EBSD analysis. The present paper demonstrates the operating principle of the SC-1000 SEMPrep apparatus and its outstanding abilities. Here we present Ar ion polishing of different conductive and nonconductive materials followed by high-resolution EBSD measurements. The average image quality (IQ) number of the Kikuchi patterns has been studied as a function of polishing angle and time in order to find the optimal polishing conditions. It has also been shown that using the optimal operation parameters high-quality surfaces can be obtained on different metallic and non-metallic materials.

Original languageEnglish
Title of host publicationProceedings of the 2014 International Conference on Nanoscience and Nanotechnology, ICONN 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781479935215
DOIs
Publication statusPublished - Nov 21 2014
Event2014 International Conference on Nanoscience and Nanotechnology, ICONN 2014 - Adelaide, Australia
Duration: Feb 2 2014Feb 6 2014

Publication series

NameProceedings of the 2014 International Conference on Nanoscience and Nanotechnology, ICONN 2014

Other

Other2014 International Conference on Nanoscience and Nanotechnology, ICONN 2014
CountryAustralia
CityAdelaide
Period2/2/142/6/14

Keywords

  • electron backscatter diffraction
  • sample preparation
  • scanning electron microscopy
  • slope cutting
  • surface polishing
  • surface quality

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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    Radi, Z., Havancsak, K., Kalacska, S., & Baris, A. (2014). Surface polishing and slope cut by parallel ar ion beams for high resolution electron backscatter diffraction measurements. In Proceedings of the 2014 International Conference on Nanoscience and Nanotechnology, ICONN 2014 (pp. 1-3). [6965245] (Proceedings of the 2014 International Conference on Nanoscience and Nanotechnology, ICONN 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICONN.2014.6965245