Surface pattern formation during interdiffusion and surface reaction in the Au / GaAs system

I. Szabó, C. Cserháti, I. Iván, S. Kökényesi, I. Mojzes

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The heat treatments performed during the metallization of GaAs results in a complex sequence of diffusion induced transformations. During the process, the continuity of the Au film breaks down and islands with a wide size distribution are formed. The reaction at the Au/GaAs interface is coupled with the partial decomposition of the GaAs matrix, the formation of liquid phase alloy, and the release of As in the gas phase. In order to understand the sequence of reactions in this system, one must consider the interaction of gas, liquid and solid phases simultaneously. We have performed a set of experiments in closed and open gas phase systems and analyzed the resulting morphologies and phases. Cross sectional TEM analysis was performed simultaneously with the study of surface morphologies using SEM, and composition distribution determination with EDS and SIMS. In this system, it is not possible to describe the diffusion process with the usual one dimensional model, which assumes the homogeneity of the sample perpendicular to the diffusion front.

Original languageEnglish
Pages (from-to)891-896
Number of pages6
JournalDefect and Diffusion Forum
Volume237-240
Issue numberPART 2
Publication statusPublished - 2005

Fingerprint

Surface reactions
surface reactions
Gases
vapor phases
liquid phases
Liquids
Secondary ion mass spectrometry
Metallizing
continuity
secondary ion mass spectrometry
homogeneity
Surface morphology
solid phases
Energy dispersive spectroscopy
heat treatment
breakdown
Heat treatment
Transmission electron microscopy
Decomposition
decomposition

Keywords

  • Fractals
  • GaAs
  • III-V compounds
  • Reaction-diffusion

ASJC Scopus subject areas

  • Metals and Alloys

Cite this

Surface pattern formation during interdiffusion and surface reaction in the Au / GaAs system. / Szabó, I.; Cserháti, C.; Iván, I.; Kökényesi, S.; Mojzes, I.

In: Defect and Diffusion Forum, Vol. 237-240, No. PART 2, 2005, p. 891-896.

Research output: Contribution to journalArticle

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