Surface chemical effects of low-energy N2+ ion bombardment on single crystalline α-Al2O3

J. P. Espinós, A. R. González-Elipe, M. Mohai, I. Bertóti

Research output: Contribution to journalArticle

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Abstract

Composition changes and chemical structure alterations initiated by ion beams on metal oxide surfaces have been widely studied. Significant differences in the effect of low-keV inert (Ar+) and reactive (N2+) ion impact on a series of metal oxides have been published recently by the present authors. In this work the effect of 0.5-5 keV N2+ bombardment on single crystalline α-Al2O3 was studied by quantitative XPS. Clarifying the existing ambiguity, experimental evidence is presented that supports the preferential oxygen loss and build-up of nitrogen. The oxygen loss increased with increasing N2+ ion energy until approaching an atomic ratio saturation value of O/Al to approximately 1 on 3.5 keV bombardment with the concomitant build-up of N at N/Al to approximately 0.5. In contrast to other oxides, for α-Al2O3 two major types of nitrogen were detected on N2+ impact; the two N 1s lines were separated by 7 eV. The one at 396.4 eV binding energy corresponds to a nitride-type N-Al environment, similar to that found in bulk AlN. Formation of the nitride is interpreted as the result of replacement of lattice oxygen around Al by implanted nitrogen in a two-stage process. The 403.4 eV component is assigned to nitrogen trapped in the cation-deficient lattice of α-Al2O3 in empty octahedral sites surrounded by oxygen atoms bonded to Al. Both of these chemical states of nitrogen were stable on heating up to 550-650 °C.

Original languageEnglish
Pages (from-to)90-94
Number of pages5
JournalSurface and Interface Analysis
Volume30
Issue number1
DOIs
Publication statusPublished - Aug 2000

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chemical effects
Ion bombardment
bombardment
Nitrogen
Crystalline materials
nitrogen
Oxides
Oxygen
ions
Nitrides
nitrides
metal oxides
oxygen
Metals
energy
Ions
ion impact
Binding energy
ambiguity
Ion beams

ASJC Scopus subject areas

  • Colloid and Surface Chemistry
  • Physical and Theoretical Chemistry

Cite this

Surface chemical effects of low-energy N2+ ion bombardment on single crystalline α-Al2O3. / Espinós, J. P.; González-Elipe, A. R.; Mohai, M.; Bertóti, I.

In: Surface and Interface Analysis, Vol. 30, No. 1, 08.2000, p. 90-94.

Research output: Contribution to journalArticle

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