Surface characterisation of plasma-nitrided titanium: an XPS study

I. Bertóti, M. Mohai, J. L. Sullivan, S. O. Saied

Research output: Contribution to journalArticle

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Abstract

DC plasma nitriding was applied to titanium metal sheets in a commercial cell using Ar + NH3 as the admixture and the nitrided surface investigated by means of XPS. As a comparison, in situ nitriding of a chemically pure Ti surface at room temperature was performed by N2+ ion bombardment (1-5 keV) in the electron spectrometer. Synthesis of the complex Ti2p envelope was accomplished using two sets of loss peaks, separated by 1.6 and 3.0 eV from the major TiN-type Ti2p 3 2 and Ti2p 1 2 components. A doublet at 458.8 and 464.5 eV was also included to account for a TiO2-type oxide. The sum of the main Ti TiN peak and the two loss peaks were taken to be representative of nearly stoichiometric TiNx with x ranging from 0.85 to 1.15. Further components derived from the peak synthesis were assigned to TiNxOy and Ti2O3. The stoichiometric nitride is represented by a Ti2p doublet at binding energies of 454.7 and 460.6 eV and a single sharp N 1s peak at 396.7 ± 0.1 eV. On the superstoichiometric samples, especially after N2+ bombardment, a second peak appears at about 395.8 eV with a positive correlation between this peak concentration and the relative amounts of species (TiNxOy, Ti2O3, TiO2) derived from Ti2p components and the surface O and N content. Consecutive Ar+, N2+ and (N2+ + O2+) bombardment leads to significant changes in composition together with rearrangement of short-range chemical structure which is reflected in peak-shape changes of the Ti2p and N 1s lines.

Original languageEnglish
Pages (from-to)357-371
Number of pages15
JournalApplied Surface Science
Volume84
Issue number4
DOIs
Publication statusPublished - 1995

Fingerprint

Titanium
X ray photoelectron spectroscopy
titanium
Nitriding
Plasmas
Sheet metal
Ion bombardment
Binding energy
bombardment
Nitrides
Oxides
Spectrometers
nitriding
Electrons
Chemical analysis
metal sheets
synthesis
admixtures
nitrides
Temperature

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physical and Theoretical Chemistry
  • Condensed Matter Physics

Cite this

Surface characterisation of plasma-nitrided titanium : an XPS study. / Bertóti, I.; Mohai, M.; Sullivan, J. L.; Saied, S. O.

In: Applied Surface Science, Vol. 84, No. 4, 1995, p. 357-371.

Research output: Contribution to journalArticle

Bertóti, I. ; Mohai, M. ; Sullivan, J. L. ; Saied, S. O. / Surface characterisation of plasma-nitrided titanium : an XPS study. In: Applied Surface Science. 1995 ; Vol. 84, No. 4. pp. 357-371.
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