Substrate induced enhancement of atomic layer growth on Al(1 1 1)

The effect of the mass anisotropy

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The evolution of the thin-film morphology is studied by molecular dynamics simulations and we find a strong tendency of adatom island growth on the (1 1 1) surface of a thin Al overlayer placed on a heavy substrate (Pt(1 1 1)) when the system is subjected to low-energy Xe+ irradiation. The large adatom yield of 102-103 is found for 5-10 keV rare gas ion impacts. We also find that the mass effect due to the small atomic mass ratio (large mass anisotropy) in the bilayer has a direct effect on the atomic layer growth on the surface. A mass anisotropy induced scattering of the light overlayer atoms from the heavy substrate contributes to the enhancement of adatom production. It has been found that the volume increase (density decrease) of the amorphous intermixed phase keeps the adatoms on the surface. The competition between cratering and atomic layer growth can also be seen: three events out of 10 leads to cratering (erosion) morphology at 6 keV ion energy. The substrate induced enhancement of atomic layer growth might be a promising tool for making arrays of nanodots as nanotemplates for nanofabrication.

Original languageEnglish
Pages (from-to)170-176
Number of pages7
JournalSurface Science
Volume585
Issue number3
DOIs
Publication statusPublished - Jul 10 2005

Fingerprint

Adatoms
adatoms
Anisotropy
cratering
anisotropy
augmentation
Substrates
Ions
Noble Gases
ion impact
atomic weights
nanofabrication
Inert gases
Nanotechnology
mass ratios
erosion
Molecular dynamics
rare gases
Erosion
tendencies

Keywords

  • Al/Pt
  • Atomic layer growth
  • Atomistic simulation
  • Ion-sputtering
  • Mass anisotropy
  • Molecular dynamics
  • Substrate effect

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Substrate induced enhancement of atomic layer growth on Al(1 1 1) : The effect of the mass anisotropy. / Süle, P.

In: Surface Science, Vol. 585, No. 3, 10.07.2005, p. 170-176.

Research output: Contribution to journalArticle

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