Fabrication results of sub-micrometer holes on diamond-like amorphous carbon (DLC) coated surfaces produced by ablation with femtosecond laser pulses are reported. This technologically important coating material has not been studied in laser ablation experiments so far. In contrast to earlier experiments with metallic coatings on glass substrates, even the damaged area does not exceed the sub-micrometer size scale on DLC coatings deposited on Si wafers due to the basically different mechanical and ion diffusion properties and nonlinearity playing role in the ablation process.
|Number of pages||3|
|Journal||Springer Series in Chemical Physics|
|Publication status||Published - May 17 2003|
ASJC Scopus subject areas
- Physical and Theoretical Chemistry