Sub-100 nm lines produced by direct laser ablation in polyimide

H. M. Phillips, D. L. Callahan, R. Sauerbrey, G. Szabó, Z. Bor

Research output: Contribution to journalArticle

90 Citations (Scopus)

Abstract

Periodic line structures with a period of 167 nm and linewidths varying from 35 to 100 nm have been produced on polyimide by direct ablation with a KrF laser using an interferometric technique. Since ablation is a nonlinear process, the resolution can exceed that expected from the wavelength and numerical aperture of the system and the linewidth can be controlled by varying the laser fluence. This externally generated period of 167 nm prevents the spontaneous growth of periodic surface structures due to radiation remnants.

Original languageEnglish
Pages (from-to)2761-2763
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number24
DOIs
Publication statusPublished - 1991

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polyimides
laser ablation
ablation
numerical aperture
lasers
fluence
apertures
radiation
wavelengths

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Phillips, H. M., Callahan, D. L., Sauerbrey, R., Szabó, G., & Bor, Z. (1991). Sub-100 nm lines produced by direct laser ablation in polyimide. Applied Physics Letters, 58(24), 2761-2763. https://doi.org/10.1063/1.104778

Sub-100 nm lines produced by direct laser ablation in polyimide. / Phillips, H. M.; Callahan, D. L.; Sauerbrey, R.; Szabó, G.; Bor, Z.

In: Applied Physics Letters, Vol. 58, No. 24, 1991, p. 2761-2763.

Research output: Contribution to journalArticle

Phillips, HM, Callahan, DL, Sauerbrey, R, Szabó, G & Bor, Z 1991, 'Sub-100 nm lines produced by direct laser ablation in polyimide', Applied Physics Letters, vol. 58, no. 24, pp. 2761-2763. https://doi.org/10.1063/1.104778
Phillips, H. M. ; Callahan, D. L. ; Sauerbrey, R. ; Szabó, G. ; Bor, Z. / Sub-100 nm lines produced by direct laser ablation in polyimide. In: Applied Physics Letters. 1991 ; Vol. 58, No. 24. pp. 2761-2763.
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