Study of ZrO2 film evolution by secondary ion mass spectrometry

S. Daolio, J. Kristóf, C. Piccirillo, S. Gelosi, B. Facchin, C. Pagura

Research output: Contribution to journalArticle

3 Citations (Scopus)


The formation of thermally prepared ZrO2 thin films on nickel and titanium supports from a hydrated ZrOCl2 precursor was followed as a function of the calcination temperature by secondary ion mass spectrometry. Concentration depth profiles of selected species (e.g. O-, Cl-, ZrO2-, C2H2-) were used to follow the process of film evolution. Although no reaction between the coating and support takes place, the zirconia films show differences in the distribution of main and trace components in the films as well as in the nature of the coating-support interface. The results are in agreement with those of former thermoanalytical and evolved gas analysis studies.

Original languageEnglish
Pages (from-to)1769-1773
Number of pages5
JournalRapid Communications in Mass Spectrometry
Issue number14
Publication statusPublished - Dec 1 1996


ASJC Scopus subject areas

  • Analytical Chemistry
  • Spectroscopy
  • Organic Chemistry

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