Study of multilayer substrate surface roughness using RBS with improved depth resolution

N. P. Barradas, J. C. Soares, M. F. da Silva, F. Pászti, E. Szilágyi

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

In magnetic superlattices the thickness of the layers and their interface structure are determinant for the magnetic properties. However, the 5 nm depth resolution normally achieved with the RBS technique is not enough to allow the study of these systems. In this paper, depth resolutions down to 1.2 nm, recently achieved in RBS measurements of Co/Re superlattices using grazing angle of incidence, are compared to computer simulations, and good agreement is found. The effect of the substrate surface roughness is taken into account using a simple phenomenological model. A way to further improve the depth resolution is also discussed.

Original languageEnglish
Pages (from-to)266-270
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume94
Issue number3
DOIs
Publication statusPublished - 1994

Fingerprint

Magnetic thin films
Superlattices
Magnetic properties
Multilayers
surface roughness
Surface roughness
superlattices
Computer simulation
Substrates
grazing
determinants
incidence
computerized simulation
magnetic properties

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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T1 - Study of multilayer substrate surface roughness using RBS with improved depth resolution

AU - Barradas, N. P.

AU - Soares, J. C.

AU - da Silva, M. F.

AU - Pászti, F.

AU - Szilágyi, E.

PY - 1994

Y1 - 1994

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AB - In magnetic superlattices the thickness of the layers and their interface structure are determinant for the magnetic properties. However, the 5 nm depth resolution normally achieved with the RBS technique is not enough to allow the study of these systems. In this paper, depth resolutions down to 1.2 nm, recently achieved in RBS measurements of Co/Re superlattices using grazing angle of incidence, are compared to computer simulations, and good agreement is found. The effect of the substrate surface roughness is taken into account using a simple phenomenological model. A way to further improve the depth resolution is also discussed.

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