Structured-illumination Makyoh-topography: Optimum grid position and its constraints

Research output: Contribution to journalArticle

Abstract

Complementing conventional Makyoh topography with structured illumination using a sparse square grid, the large-scale surface shape can be calculated with a deflectometry approach, while the sample's morphology can still be imaged. However, the grid's image must be sharp not to mask the Makyoh image of the sample morphology. In this paper, the instrumental conditions for the grid sharpness are established. The two main types of Makyoh set-ups (lens and mirror based) are analysed. It is shown that the lens-based set-ups allow the position of the grid to be sharp on the Makyoh image. However, for mirror-based set-ups this is not possible because of geometrical instrumental constraints. The calculations are corroborated with experiments.

Original languageEnglish
Article number045009
JournalSurface Topography: Metrology and Properties
Volume6
Issue number4
DOIs
Publication statusPublished - Nov 20 2018

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Topography
Lenses
topography
Mirrors
Lighting
illumination
grids
Masks
lenses
mirrors
sharpness
masks
Experiments

ASJC Scopus subject areas

  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Structured-illumination Makyoh-topography : Optimum grid position and its constraints. / Riesz, F.

In: Surface Topography: Metrology and Properties, Vol. 6, No. 4, 045009, 20.11.2018.

Research output: Contribution to journalArticle

@article{a90bfbf61c4c489bb494d82367f83bc9,
title = "Structured-illumination Makyoh-topography: Optimum grid position and its constraints",
abstract = "Complementing conventional Makyoh topography with structured illumination using a sparse square grid, the large-scale surface shape can be calculated with a deflectometry approach, while the sample's morphology can still be imaged. However, the grid's image must be sharp not to mask the Makyoh image of the sample morphology. In this paper, the instrumental conditions for the grid sharpness are established. The two main types of Makyoh set-ups (lens and mirror based) are analysed. It is shown that the lens-based set-ups allow the position of the grid to be sharp on the Makyoh image. However, for mirror-based set-ups this is not possible because of geometrical instrumental constraints. The calculations are corroborated with experiments.",
author = "F. Riesz",
year = "2018",
month = "11",
day = "20",
doi = "10.1088/2051-672X/aaeb86",
language = "English",
volume = "6",
journal = "Surface Topography: Metrology and Properties",
issn = "2051-672X",
publisher = "IOP Publishing Ltd.",
number = "4",

}

TY - JOUR

T1 - Structured-illumination Makyoh-topography

T2 - Optimum grid position and its constraints

AU - Riesz, F.

PY - 2018/11/20

Y1 - 2018/11/20

N2 - Complementing conventional Makyoh topography with structured illumination using a sparse square grid, the large-scale surface shape can be calculated with a deflectometry approach, while the sample's morphology can still be imaged. However, the grid's image must be sharp not to mask the Makyoh image of the sample morphology. In this paper, the instrumental conditions for the grid sharpness are established. The two main types of Makyoh set-ups (lens and mirror based) are analysed. It is shown that the lens-based set-ups allow the position of the grid to be sharp on the Makyoh image. However, for mirror-based set-ups this is not possible because of geometrical instrumental constraints. The calculations are corroborated with experiments.

AB - Complementing conventional Makyoh topography with structured illumination using a sparse square grid, the large-scale surface shape can be calculated with a deflectometry approach, while the sample's morphology can still be imaged. However, the grid's image must be sharp not to mask the Makyoh image of the sample morphology. In this paper, the instrumental conditions for the grid sharpness are established. The two main types of Makyoh set-ups (lens and mirror based) are analysed. It is shown that the lens-based set-ups allow the position of the grid to be sharp on the Makyoh image. However, for mirror-based set-ups this is not possible because of geometrical instrumental constraints. The calculations are corroborated with experiments.

UR - http://www.scopus.com/inward/record.url?scp=85064082839&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85064082839&partnerID=8YFLogxK

U2 - 10.1088/2051-672X/aaeb86

DO - 10.1088/2051-672X/aaeb86

M3 - Article

AN - SCOPUS:85064082839

VL - 6

JO - Surface Topography: Metrology and Properties

JF - Surface Topography: Metrology and Properties

SN - 2051-672X

IS - 4

M1 - 045009

ER -