Structure of thin-film nickel-carbon composites formed by microwave plasma-enhanced chemical vapor deposition

V. V. Uglov, M. V. Astashynskaya, A. K. Kuleshov, M. P. Samtsov, P. B. Barna

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2 Citations (Scopus)

Abstract

The results of structure research of thin-film nickel-carbon hydrogenated composites formed by the method of the combination of plasma-enhanced chemical vapor deposition of carbon from mixture of reactive gases (Ar + CH4) and physical sputtering of the nickel target are presented. It has been established in the study of composites by transmission electron microscopy that the microstructure of thin-film composites changed from fragmenting columnar to finely dispersed with increase in carbon concentration.

Original languageEnglish
Pages (from-to)791-795
Number of pages5
JournalJournal of Surface Investigation
Volume5
Issue number4
DOIs
Publication statusPublished - Aug 1 2011

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ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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