Structure of sputtered nanocomposite CrCx/a-C

H thin films

G. Gassner, J. Patscheider, P. H. Mayrhofer, E. Hegedus, L. Tóth, I. Kovacs, B. Pécz, V. Srot, Ch Scheu, C. Mitterer

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

This work presents the structural evolution of nanocomposite CrC x/a-C:H coatings prepared by unbalanced magnetron sputtering of a metallic Cr target in Ar+CH4 glow discharges using low negative dc bias voltages. Raman spectroscopy and x-ray photoelectron spectroscopy were used to characterize the phase composition and the chemical bonding in the films deposited at different experimental conditions. The results were correlated to the chemical composition obtained by elastic recoil detection analysis. The coating microstructure was investigated on selected samples by high-resolution transmission electron microscopy combined with electron energy-loss spectroscopy analysis. The nanocomposite coatings can be divided into hard CrCx dominated films, when prepared at low CH4 partial pressure to total pressure (pt) ratios (pCH4 /ptCH4 /pt>0.4. The structure of the low-friction a-C:H dominated coatings consists of 2-10 nm sized fcc CrC crystallites embedded in a Cr containing a-C:H matrix.

Original languageEnglish
Pages (from-to)1837-1843
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume24
Issue number4
DOIs
Publication statusPublished - Jul 2006

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Nanocomposites
nanocomposites
coatings
Thin films
Coatings
thin films
pressure ratio
Electron energy loss spectroscopy
Glow discharges
Photoelectron spectroscopy
High resolution transmission electron microscopy
Bias voltage
Crystallites
Phase composition
glow discharges
Partial pressure
Magnetron sputtering
x ray spectroscopy
crystallites
partial pressure

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Structure of sputtered nanocomposite CrCx/a-C : H thin films. / Gassner, G.; Patscheider, J.; Mayrhofer, P. H.; Hegedus, E.; Tóth, L.; Kovacs, I.; Pécz, B.; Srot, V.; Scheu, Ch; Mitterer, C.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 24, No. 4, 07.2006, p. 1837-1843.

Research output: Contribution to journalArticle

Gassner, G, Patscheider, J, Mayrhofer, PH, Hegedus, E, Tóth, L, Kovacs, I, Pécz, B, Srot, V, Scheu, C & Mitterer, C 2006, 'Structure of sputtered nanocomposite CrCx/a-C: H thin films', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 24, no. 4, pp. 1837-1843. https://doi.org/10.1116/1.2216713
Gassner, G. ; Patscheider, J. ; Mayrhofer, P. H. ; Hegedus, E. ; Tóth, L. ; Kovacs, I. ; Pécz, B. ; Srot, V. ; Scheu, Ch ; Mitterer, C. / Structure of sputtered nanocomposite CrCx/a-C : H thin films. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2006 ; Vol. 24, No. 4. pp. 1837-1843.
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