Structure formation during deposition of polycrystalline metallic thin films

Research output: Chapter in Book/Report/Conference proceedingChapter

6 Citations (Scopus)

Abstract

The self-organized structure evolution of elemental and multicomponent/multiphase polycrystalline metallic thin films is discussed and summarized in a synthesized view. Structure evolution is considered in its entirety and discussed in frames of the pathway of fundamental phenomena of structure formation (nucleation, crystal growth and grain growth) which are related to atomic processes. it is shown that in the case of functional, generally multicomponent films, the key issues are the understanding of the very complex atomic processes, the nucleation and separation of phases as well as their interdependent, competitive growth. The derived temperature (TSZM) and composition (CoSZM) structure zone models describe the interdependent development of the phases, the grain size and shape, the texture and surface morphology.

Original languageEnglish
Title of host publicationMetallic Films for Electronic, Optical and Magnetic Applications
Subtitle of host publicationStructure, Processing and Properties
PublisherElsevier Ltd
Pages67-120
Number of pages54
ISBN (Print)9780857090577
DOIs
Publication statusPublished - Dec 1 2013

Keywords

  • Fundamental phenomena
  • Polycrystalline films
  • Self-organization
  • Structure evolution
  • Structure zone models
  • Synthesized view

ASJC Scopus subject areas

  • Materials Science(all)

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  • Cite this

    Barna, P. B., & Radnóczi, G. (2013). Structure formation during deposition of polycrystalline metallic thin films. In Metallic Films for Electronic, Optical and Magnetic Applications: Structure, Processing and Properties (pp. 67-120). Elsevier Ltd. https://doi.org/10.1533/9780857096296.1.67