Structure evolution of stratified NdF3 optical thin films

M. Adamik, I. Tomov, U. Kaiser, S. Laux, C. Schmidt, W. Richter, G. Sáfrán, P. Barna

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The structure evolution characteristics of single and stratified NdF3 optical thin films on amorphous quartz substrates have been investigated by cross sectional transmission electron microscopy, x-ray diffractometer measurements and atomic force microscopy. The films were deposited by physical vapor deposition under ultra high vacuum conditions. The morphology changes with substrate temperature from V shaped columnar (Zone T) to a columnar morphology corresponding to zone II. The zone boundary falls in the range above 300 °C. The surface roughness of the single films is lowest at 300 °C substrate temperature. The main texture components are , respectively for the three single films of increasing substrate temperature. The surface roughness is decreased by the stratification. The grain size is increased by stratification with CaF2 and decreased by stratification with MgF2 compared to the grain size of the single film at the same substrate temperature.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsR.L. Hall
Pages123-131
Number of pages9
Volume3133
DOIs
Publication statusPublished - 1997
EventOptical Thin Films V: New Developments - San diego, CA, United States
Duration: Jul 30 1997Aug 1 1997

Other

OtherOptical Thin Films V: New Developments
CountryUnited States
CitySan diego, CA
Period7/30/978/1/97

Fingerprint

Optical films
Thin films
stratification
Substrates
thin films
surface roughness
grain size
Surface roughness
Temperature
temperature
Diffractometers
Physical vapor deposition
Ultrahigh vacuum
diffractometers
ultrahigh vacuum
Quartz
Atomic force microscopy
textures
quartz
Textures

Keywords

  • Extinction
  • Morphology
  • Stratification
  • Surface roughness
  • Texture
  • Thin film

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Adamik, M., Tomov, I., Kaiser, U., Laux, S., Schmidt, C., Richter, W., ... Barna, P. (1997). Structure evolution of stratified NdF3 optical thin films. In R. L. Hall (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3133, pp. 123-131) https://doi.org/10.1117/12.290187

Structure evolution of stratified NdF3 optical thin films. / Adamik, M.; Tomov, I.; Kaiser, U.; Laux, S.; Schmidt, C.; Richter, W.; Sáfrán, G.; Barna, P.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / R.L. Hall. Vol. 3133 1997. p. 123-131.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Adamik, M, Tomov, I, Kaiser, U, Laux, S, Schmidt, C, Richter, W, Sáfrán, G & Barna, P 1997, Structure evolution of stratified NdF3 optical thin films. in RL Hall (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 3133, pp. 123-131, Optical Thin Films V: New Developments, San diego, CA, United States, 7/30/97. https://doi.org/10.1117/12.290187
Adamik M, Tomov I, Kaiser U, Laux S, Schmidt C, Richter W et al. Structure evolution of stratified NdF3 optical thin films. In Hall RL, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3133. 1997. p. 123-131 https://doi.org/10.1117/12.290187
Adamik, M. ; Tomov, I. ; Kaiser, U. ; Laux, S. ; Schmidt, C. ; Richter, W. ; Sáfrán, G. ; Barna, P. / Structure evolution of stratified NdF3 optical thin films. Proceedings of SPIE - The International Society for Optical Engineering. editor / R.L. Hall. Vol. 3133 1997. pp. 123-131
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