Structure evolution of stratified NdF3 optical thin films

M. Adamik, I. Tomov, U. Kaiser, S. Laux, C. Schmidt, W. Richter, G. Sáfrán, P. B. Barna

Research output: Contribution to journalConference article

Abstract

The structure evolution characteristics of single and stratified NdF3 optical thin films on amorphous quartz substrates have been investigated by cross sectional transmission electron microscopy, x-ray diffractometer measurements and atomic force microscopy. The films were deposited by physical vapor deposition under ultra high vacuum conditions. The morphology changes with substrate temperature from V shaped columnar (Zone T) to a columnar morphology corresponding to zone II. The zone boundary falls in the range above 300 °C. The surface roughness of the single films is lowest at 300 °C substrate temperature. The main texture components are <111>, <1137gt; and <001> respectively for the three single films of increasing substrate temperature. The surface roughness is decreased by the stratification. The grain size is increased by stratification with CaF2 and decreased by stratification with MgF2 compared to the grain size of the single film at the same substrate temperature.

Original languageEnglish
Pages (from-to)123-131
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3133
DOIs
Publication statusPublished - Dec 1 1997
EventOptical Thin Films V: New Developments - San diego, CA, United States
Duration: Jul 30 1997Aug 1 1997

Keywords

  • Extinction
  • Morphology
  • Stratification
  • Surface roughness
  • Texture
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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