Structure and composition of thermally annealed Mo- and W-based CVD metal oxide thin films

K. Gesheva, A. Cziráki, T. Ivanova, A. Szekeres

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Thin films of molybdenum, tungsten and mixed MoO3-WO3 oxides obtained by atmospheric pressure chemical vapor deposition (APCVD) are investigated by applying Raman and XRD measurements. All the films were prepared by identical technological parameters and were annealed at 400 °C. Analysis of the Raman and XRD spectra of the three types of films shows that molybdenum oxide films crystallize in orthorombic MoO3 with a small fraction of MoO2.89 sub-oxide, while the annealed tungsten oxide films are triclinic WO3 with less than 2% sub-oxide of W20O 58. The Raman spectra of the mixed MoO3-WO3 films indicate crystalline phases of molybdenum and tungsten oxides in an amorphous framework. In addition, XRD results show that the structure of the mixed oxides follows the crystallization of WO3 and Mo atoms are suggested to be substitute of W in the WO3 lattice.

Original languageEnglish
Pages (from-to)322-326
Number of pages5
JournalThin Solid Films
Volume492
Issue number1-2
DOIs
Publication statusPublished - Dec 1 2005

Fingerprint

Oxides
Oxide films
metal oxides
Chemical vapor deposition
molybdenum oxides
tungsten oxides
Metals
vapor deposition
Thin films
Molybdenum
oxides
oxide films
Tungsten
thin films
Chemical analysis
Raman spectra
mixed oxides
Molybdenum oxide
molybdenum
atmospheric pressure

Keywords

  • Chemical vapor deposition
  • Crystallization
  • Ellipsometry
  • Metal oxide films
  • Raman scattering
  • X-ray diffraction

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Structure and composition of thermally annealed Mo- and W-based CVD metal oxide thin films. / Gesheva, K.; Cziráki, A.; Ivanova, T.; Szekeres, A.

In: Thin Solid Films, Vol. 492, No. 1-2, 01.12.2005, p. 322-326.

Research output: Contribution to journalArticle

Gesheva, K. ; Cziráki, A. ; Ivanova, T. ; Szekeres, A. / Structure and composition of thermally annealed Mo- and W-based CVD metal oxide thin films. In: Thin Solid Films. 2005 ; Vol. 492, No. 1-2. pp. 322-326.
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