Structure and composition of carbon-nitride films grown by sub-ps PLD

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

CNx (0.012 atmosphere with a hybrid dye/excimer laser system delivering pulses of 500 fs duration at 248 nm. Changes in surface composition and morphology of the as grown films, as a function of N2 pressure (between 0.3 and 60Pa), laser pulse energy (maximum 10mJ), and spot area are reported, by means of X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM), respectively. In the pressure domain investigated, the nitrogen content increases as a power function. While both pulse energy and spot area influence the chemical composition of the films, the same fluence achieved by using different spot sizes results in films of different N content. Deposition of micrometer sized particulates is apparently suppressed, while sub-micron features of typically circular shape are present over the smooth film surface.

Original languageEnglish
Pages (from-to)547-552
Number of pages6
JournalApplied Surface Science
Volume208-209
Issue number1
DOIs
Publication statusPublished - Mar 15 2003

Fingerprint

carbon nitrides
Carbon nitride
Pulsed laser deposition
Chemical analysis
Laser pulses
pulses
Dye lasers
Excimer lasers
Surface structure
dye lasers
excimer lasers
particulates
Surface morphology
micrometers
fluence
chemical composition
Nitrogen
X ray photoelectron spectroscopy
photoelectron spectroscopy
nitrogen

Keywords

  • Carbon-nitride
  • Femtosecond
  • Pulsed laser deposition
  • Sub-micron particulates

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Structure and composition of carbon-nitride films grown by sub-ps PLD. / Geretovszky, Z.; Kántor, Z.; Szörényi, T.

In: Applied Surface Science, Vol. 208-209, No. 1, 15.03.2003, p. 547-552.

Research output: Contribution to journalArticle

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