Structural transformations of ultra-thin sputtered Pd activator layers on glass and SnO2 surfaces

J. Mizsei, J. Voutilainen, S. Saukko, V. Lantto

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Catalytically active metal surfaces are used in semiconductor gas sensors, and also in calorimetric gas sensors, as metal-cluster deposits to increase the selectivity and sensitivity, and to reduce the response and recovery times. In this paper, we have studied the properties of ultra-thin sputtered palladium layers on insulator and oxide-semiconductor surfaces during annealing up to 500°C. Pd layers were sputtered on glass and tin-dioxide thin-film surfaces. Atomic force microscopy (AFM), X-ray diffraction (XRD), vibrating capacitor (Kelvin probe), and resistance measurements were used to study the sputtered Pd layers. The results help us to understand the phenomena during the activation process of Pd catalyst (amorphous-crystalline transition, oxidisation, reduction, agglomeration) as well as to develop a more effective and reproducible technology for the activation of sputtered catalyst layers in semiconductor gas sensors.

Original languageEnglish
Pages (from-to)209-215
Number of pages7
JournalThin Solid Films
Volume391
Issue number2
DOIs
Publication statusPublished - Jul 16 2001

Fingerprint

Chemical sensors
Glass
glass
Metals
Chemical activation
Semiconductor materials
Tin dioxide
sensors
Catalysts
gases
Palladium
activation
catalysts
Atomic force microscopy
Capacitors
metal clusters
Deposits
Agglomeration
agglomeration
dioxides

Keywords

  • Agglomeration
  • Gas sensor
  • Nanolayer
  • Palladium
  • Tin dioxide

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Structural transformations of ultra-thin sputtered Pd activator layers on glass and SnO2 surfaces. / Mizsei, J.; Voutilainen, J.; Saukko, S.; Lantto, V.

In: Thin Solid Films, Vol. 391, No. 2, 16.07.2001, p. 209-215.

Research output: Contribution to journalArticle

Mizsei, J. ; Voutilainen, J. ; Saukko, S. ; Lantto, V. / Structural transformations of ultra-thin sputtered Pd activator layers on glass and SnO2 surfaces. In: Thin Solid Films. 2001 ; Vol. 391, No. 2. pp. 209-215.
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