Structural evaluation of a Mo/Si multilayer, analyzed with various wavelengths

Y. Ito, T. Mukoyama, K. Omote, K. Shimizu, A. Nisawa, T. Shoji, H. Terauchi, S. Kuehner

Research output: Contribution to journalArticle

Abstract

A Mo/Si multilayer is synthesized and its structure is evaluated on an atomic scale using various soft X-rays (MgKα, FKα, OKα, and CKα). Two types of models based on the optical and diffraction methods were considered. It is found that the latter theory is more effective in extracting the multilayer structure.

Original languageEnglish
Pages (from-to)355-359
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume75
Issue number1-4
DOIs
Publication statusPublished - Apr 3 1993

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laminates
Multilayers
optics
Wavelength
evaluation
diffraction
wavelengths
x rays
Diffraction
X rays

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Structural evaluation of a Mo/Si multilayer, analyzed with various wavelengths. / Ito, Y.; Mukoyama, T.; Omote, K.; Shimizu, K.; Nisawa, A.; Shoji, T.; Terauchi, H.; Kuehner, S.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 75, No. 1-4, 03.04.1993, p. 355-359.

Research output: Contribution to journalArticle

Ito, Y. ; Mukoyama, T. ; Omote, K. ; Shimizu, K. ; Nisawa, A. ; Shoji, T. ; Terauchi, H. ; Kuehner, S. / Structural evaluation of a Mo/Si multilayer, analyzed with various wavelengths. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1993 ; Vol. 75, No. 1-4. pp. 355-359.
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