Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

E. Broitman, N. Hellgren, Zs Czigány, R. D. Twesten, J. Luning, I. Petrov, L. Hultman, B. C. Holloway

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

A systematic study of physical properties of sputter-deposited DLC films was performed as a function of flux ratio and ion energy. The energy and flux ions and neutral atoms impinging on the surface of the growing films were deduced from Langmuir probe measurements and theoretical calculations. The bombardment of growing films by the energetic particles led to changes in microstructure and mechanical properties. Results suggest that the presence of defective graphite formed by subplanted C and Ar atoms is the dominant influence on the mechanical properties of the DLC films.

Original languageEnglish
Pages (from-to)851-859
Number of pages9
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number4
DOIs
Publication statusPublished - Jul 1 2003

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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