Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

E. Broitman, N. Hellgren, Z. Czigány, R. D. Twesten, J. Luning, I. Petrov, L. Hultman, B. C. Holloway

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

A systematic study of physical properties of sputter-deposited DLC films was performed as a function of flux ratio and ion energy. The energy and flux ions and neutral atoms impinging on the surface of the growing films were deduced from Langmuir probe measurements and theoretical calculations. The bombardment of growing films by the energetic particles led to changes in microstructure and mechanical properties. Results suggest that the presence of defective graphite formed by subplanted C and Ar atoms is the dominant influence on the mechanical properties of the DLC films.

Original languageEnglish
Pages (from-to)851-859
Number of pages9
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number4
DOIs
Publication statusPublished - Jul 2003

Fingerprint

Diamond like carbon films
Film growth
Magnetron sputtering
Structural properties
magnetron sputtering
direct current
diamonds
mechanical properties
Ions
Fluxes
Langmuir probes
Atoms
Mechanical properties
Graphite
carbon
Physical properties
Microstructure
electrostatic probes
energetic particles
neutral atoms

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering. / Broitman, E.; Hellgren, N.; Czigány, Z.; Twesten, R. D.; Luning, J.; Petrov, I.; Hultman, L.; Holloway, B. C.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 21, No. 4, 07.2003, p. 851-859.

Research output: Contribution to journalArticle

Broitman, E. ; Hellgren, N. ; Czigány, Z. ; Twesten, R. D. ; Luning, J. ; Petrov, I. ; Hultman, L. ; Holloway, B. C. / Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2003 ; Vol. 21, No. 4. pp. 851-859.
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