Structural and electrical changes during the heat treatment of Au-SiOx cermet films

M. Lomniczy, A. Barna, P. B. Barna, J. F. Pocza, I. Pozsgai

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Abstract

Au-SiOx cermet films with different gold contents (20-80%) have been produced by vacuum deposition at substrate temperatures between 25° and 400°C. The changes in structure and electrical properties which take place during heat treatment have been studied by electron diffraction and stereo electron microscopy. In situ electron microscopy allows the simultaneous observation of structural reordering and variations in the electrical resistivity of the film. The coagulation of gold caused by the reordering processes during the heat treatment is affected by the deposition conditions. The distribution of the gold islands in the thickness of the film has been investigated by stereo electron microscopy. Relations between the morphology and the electrical properties-sheet resistance, temperature coefficient and frequency dependence of the resistance-of the cermet films were obtained.

Original languageEnglish
Pages (from-to)103-108
Number of pages6
JournalThin Solid Films
Volume13
Issue number1
DOIs
Publication statusPublished - Nov 1 1972

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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