A model is presented to describe the regular ripple patterns observed in several kinds of high-dose ion-implantation experiments. The model is based on elastic instability of the implanted layer, occurring when a critical value of the lateral stress is reached during ion implantation. The predicted wavelength of wrinkling is related to the width of the implanted-atom distribution, and it is in good agreement with experimental results.
ASJC Scopus subject areas
- Condensed Matter Physics