Stimulated structural transformations in amorphous semiconductor multilayers

Research output: Contribution to journalConference article

3 Citations (Scopus)


Structural transformations, stimulated by illumination or heating are related to the interdiffusion processes in nanolayered structures, which were prepared by cyclic thermal evaporation or magnetron sputtering from Si, Ge, Se semiconductors and some As2S3, SexTe 1-x-type chalcogenide glasses. It is shown that the intermixing velocity and the related changes of optical parameters depend on the period of the multilayer and intensity of illumination. Volume extension can be stimulated at the illuminated regions and used for the surface relief formation.

Original languageEnglish
Pages (from-to)970-974
Number of pages5
JournalPhysica Status Solidi C: Conferences
Issue number3
Publication statusPublished - Dec 1 2003
Event6th International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, EXMATEC 2002 - Budapest, Hungary
Duration: May 26 2002May 29 2002


ASJC Scopus subject areas

  • Condensed Matter Physics

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