A STEP FELVEZETO-TECHNOLOGIAI SZIMULACIOS PROGRAM.

Translated title of the contribution: Step - A Semiconductor Technology Simulation Program.

Kalman Tarnay, Gyozo Drozdy, Ferenc Masszi, Pal Baji, Rang Toomas, J. Mizsei, Balazs Kovacs

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The article offers a brief description - from the user's point of view - of the Silicon Technology Evaluation Program (STEP) system under development in cooperation by the Central Research Institute of Physics of the Hungarian Academy of Sciences and the Department of Electronic Devices of the Budapest Technical University to carry out the simulation of silicon technology, which is suitable for the technological optimization of shaping the depth structure of LSI/VLSI circuits.

Original languageHungarian
Pages (from-to)460-464
Number of pages5
JournalMeres es automatika
Volume29
Issue number12
Publication statusPublished - Dec 1981

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Semiconductor materials
LSI circuits
Silicon
VLSI circuits
Physics

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Tarnay, K., Drozdy, G., Masszi, F., Baji, P., Toomas, R., Mizsei, J., & Kovacs, B. (1981). A STEP FELVEZETO-TECHNOLOGIAI SZIMULACIOS PROGRAM. Meres es automatika, 29(12), 460-464.

A STEP FELVEZETO-TECHNOLOGIAI SZIMULACIOS PROGRAM. / Tarnay, Kalman; Drozdy, Gyozo; Masszi, Ferenc; Baji, Pal; Toomas, Rang; Mizsei, J.; Kovacs, Balazs.

In: Meres es automatika, Vol. 29, No. 12, 12.1981, p. 460-464.

Research output: Contribution to journalArticle

Tarnay, K, Drozdy, G, Masszi, F, Baji, P, Toomas, R, Mizsei, J & Kovacs, B 1981, 'A STEP FELVEZETO-TECHNOLOGIAI SZIMULACIOS PROGRAM.', Meres es automatika, vol. 29, no. 12, pp. 460-464.
Tarnay K, Drozdy G, Masszi F, Baji P, Toomas R, Mizsei J et al. A STEP FELVEZETO-TECHNOLOGIAI SZIMULACIOS PROGRAM. Meres es automatika. 1981 Dec;29(12):460-464.
Tarnay, Kalman ; Drozdy, Gyozo ; Masszi, Ferenc ; Baji, Pal ; Toomas, Rang ; Mizsei, J. ; Kovacs, Balazs. / A STEP FELVEZETO-TECHNOLOGIAI SZIMULACIOS PROGRAM. In: Meres es automatika. 1981 ; Vol. 29, No. 12. pp. 460-464.
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