Translated title of the contribution: Step - A Semiconductor Technology Simulation Program.

Kalman Tarnay, Gyozo Drozdy, Ferenc Masszi, Pal Baji, Rang Toomas, Janos Mizsei, Balazs Kovacs

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The article offers a brief description - from the user's point of view - of the Silicon Technology Evaluation Program (STEP) system under development in cooperation by the Central Research Institute of Physics of the Hungarian Academy of Sciences and the Department of Electronic Devices of the Budapest Technical University to carry out the simulation of silicon technology, which is suitable for the technological optimization of shaping the depth structure of LSI/VLSI circuits.

Translated title of the contributionStep - A Semiconductor Technology Simulation Program.
Original languageHungarian
Pages (from-to)460-464
Number of pages5
JournalMeres es Automatika
Issue number12
Publication statusPublished - Jan 1 1981

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Tarnay, K., Drozdy, G., Masszi, F., Baji, P., Toomas, R., Mizsei, J., & Kovacs, B. (1981). A STEP FELVEZETO-TECHNOLOGIAI SZIMULACIOS PROGRAM. Meres es Automatika, 29(12), 460-464.