The article offers a brief description - from the user's point of view - of the Silicon Technology Evaluation Program (STEP) system under development in cooperation by the Central Research Institute of Physics of the Hungarian Academy of Sciences and the Department of Electronic Devices of the Budapest Technical University to carry out the simulation of silicon technology, which is suitable for the technological optimization of shaping the depth structure of LSI/VLSI circuits.
|Translated title of the contribution||Step - A Semiconductor Technology Simulation Program.|
|Number of pages||5|
|Journal||Meres es Automatika|
|Publication status||Published - Jan 1 1981|
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