Sputtering yields for low-energy Ar +- and Ne +-ion bombardment

Z. Somogyvári, G. Langer, G. Erdélyi, L. Balázs

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The development of fluorescent lamps requires reliable experimental data of low-energy (30-300 eV) sputtering yields of the metallic components of lamps. An experimental study was carried out to measure the sputtering yields of molybdenum, tungsten and iron using the plasma chamber of a Secondary Neutral Mass Spectrometer (SNMS). The sputtering ion beam was extracted from radio frequency noble gas (Ar/Ne)-plasmas. The number of atoms sputtered was determined from the weight loss of the target by means of a microbalance. The sputtering yields data for Mo/Ar, W/Ar and Fe/Ar target/projectile combinations and their energy dependence were in good agreement with those calculated by computer simulations and measured by other groups. The sputter yield obtained for Fe/Ne target/projectile combination shows some deviation from the simulation results.

Original languageEnglish
Pages (from-to)1979-1982
Number of pages4
JournalVacuum
Volume86
Issue number12
DOIs
Publication statusPublished - Jul 20 2012

Fingerprint

Ion bombardment
Sputtering
bombardment
sputtering
Projectiles
luminaires
projectiles
ions
Noble Gases
Plasmas
Fluorescent lamps
Tungsten
Molybdenum
energy
Mass spectrometers
Inert gases
Electric lamps
microbalances
Ion beams
mass spectrometers

Keywords

  • Fluorescent lamp
  • Low-energy sputtering
  • Plasma ion source

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Instrumentation
  • Surfaces, Coatings and Films

Cite this

Sputtering yields for low-energy Ar +- and Ne +-ion bombardment. / Somogyvári, Z.; Langer, G.; Erdélyi, G.; Balázs, L.

In: Vacuum, Vol. 86, No. 12, 20.07.2012, p. 1979-1982.

Research output: Contribution to journalArticle

Somogyvári, Z, Langer, G, Erdélyi, G & Balázs, L 2012, 'Sputtering yields for low-energy Ar +- and Ne +-ion bombardment', Vacuum, vol. 86, no. 12, pp. 1979-1982. https://doi.org/10.1016/j.vacuum.2012.03.055
Somogyvári, Z. ; Langer, G. ; Erdélyi, G. ; Balázs, L. / Sputtering yields for low-energy Ar +- and Ne +-ion bombardment. In: Vacuum. 2012 ; Vol. 86, No. 12. pp. 1979-1982.
@article{b69cf76e34a04485951118b217d1fa23,
title = "Sputtering yields for low-energy Ar +- and Ne +-ion bombardment",
abstract = "The development of fluorescent lamps requires reliable experimental data of low-energy (30-300 eV) sputtering yields of the metallic components of lamps. An experimental study was carried out to measure the sputtering yields of molybdenum, tungsten and iron using the plasma chamber of a Secondary Neutral Mass Spectrometer (SNMS). The sputtering ion beam was extracted from radio frequency noble gas (Ar/Ne)-plasmas. The number of atoms sputtered was determined from the weight loss of the target by means of a microbalance. The sputtering yields data for Mo/Ar, W/Ar and Fe/Ar target/projectile combinations and their energy dependence were in good agreement with those calculated by computer simulations and measured by other groups. The sputter yield obtained for Fe/Ne target/projectile combination shows some deviation from the simulation results.",
keywords = "Fluorescent lamp, Low-energy sputtering, Plasma ion source",
author = "Z. Somogyv{\'a}ri and G. Langer and G. Erd{\'e}lyi and L. Bal{\'a}zs",
year = "2012",
month = "7",
day = "20",
doi = "10.1016/j.vacuum.2012.03.055",
language = "English",
volume = "86",
pages = "1979--1982",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Limited",
number = "12",

}

TY - JOUR

T1 - Sputtering yields for low-energy Ar +- and Ne +-ion bombardment

AU - Somogyvári, Z.

AU - Langer, G.

AU - Erdélyi, G.

AU - Balázs, L.

PY - 2012/7/20

Y1 - 2012/7/20

N2 - The development of fluorescent lamps requires reliable experimental data of low-energy (30-300 eV) sputtering yields of the metallic components of lamps. An experimental study was carried out to measure the sputtering yields of molybdenum, tungsten and iron using the plasma chamber of a Secondary Neutral Mass Spectrometer (SNMS). The sputtering ion beam was extracted from radio frequency noble gas (Ar/Ne)-plasmas. The number of atoms sputtered was determined from the weight loss of the target by means of a microbalance. The sputtering yields data for Mo/Ar, W/Ar and Fe/Ar target/projectile combinations and their energy dependence were in good agreement with those calculated by computer simulations and measured by other groups. The sputter yield obtained for Fe/Ne target/projectile combination shows some deviation from the simulation results.

AB - The development of fluorescent lamps requires reliable experimental data of low-energy (30-300 eV) sputtering yields of the metallic components of lamps. An experimental study was carried out to measure the sputtering yields of molybdenum, tungsten and iron using the plasma chamber of a Secondary Neutral Mass Spectrometer (SNMS). The sputtering ion beam was extracted from radio frequency noble gas (Ar/Ne)-plasmas. The number of atoms sputtered was determined from the weight loss of the target by means of a microbalance. The sputtering yields data for Mo/Ar, W/Ar and Fe/Ar target/projectile combinations and their energy dependence were in good agreement with those calculated by computer simulations and measured by other groups. The sputter yield obtained for Fe/Ne target/projectile combination shows some deviation from the simulation results.

KW - Fluorescent lamp

KW - Low-energy sputtering

KW - Plasma ion source

UR - http://www.scopus.com/inward/record.url?scp=84862991240&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84862991240&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2012.03.055

DO - 10.1016/j.vacuum.2012.03.055

M3 - Article

VL - 86

SP - 1979

EP - 1982

JO - Vacuum

JF - Vacuum

SN - 0042-207X

IS - 12

ER -