Sputter deposited Cr–Si–O Cermet Films by XPS

Research output: Contribution to journalArticle

Abstract

X ray photoelectron spectroscopy (XPS) was used to characterize thin film of Cr–Si–O cermet, rf sputter deposited onto a thermally oxidized Si wafer. Angle dependent spectra (=0 and 60) were acquired on both the as received and the Ar+ ion sputtered states. In the as received state the topmost layer is enriched in Si and O; Si and Cr are present in both oxidized and reduced forms. After sputtering by Ar+ (2.5 keV, 6 1016 ions/cm2), Cr becomes reduced to Cr0, and the relative amount of Si0 increases substantially (i.e., up to about 40% of total Si). These reduced states are found to recombine to CrxSi type silicides. The Cr–Si–O layers are applied as precision thin film resistors of good long range stability with low temperature coefficient of resistivity. Heat treatment leading to crystalline silicide phaseis used to consolidate the properties of these layers for device applications. We have shown (apparently for the first time), however, that room temperature ion impact can also create highly dispersednondetectable by XRDsilicide clusters, the formation of which has been deduced from the Si Auger parameter, being significantly higher for the silicide (aSi=1716.2–1716.5 eV) than for elemental Si (aSi=1716.0 eV).

Original languageEnglish
Pages (from-to)105-111
Number of pages7
JournalSurface Science Spectra
Volume3
Issue number2
DOIs
Publication statusPublished - 1994

Fingerprint

Cermet Cements
X ray photoelectron spectroscopy
photoelectron spectroscopy
Ions
Thin films
Silicides
x rays
ion impact
silicides
thin films
resistors
Resistors
Sputtering
ions
heat treatment
sputtering
Heat treatment
wafers
Crystalline materials
Temperature

Keywords

  • AMORPHOUS STATE
  • ANGULAR DISTRIBUTION
  • ATOMIC CLUSTERS
  • CERMETS
  • CHEMICAL COMPOSITION
  • CHROMIUM OXIDES
  • PHOTOELECTRON SPECTROSCOPY
  • RESISTORS
  • SILICON OXIDES
  • SPUTTERED MATERIALS
  • THIN FILMS

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Condensed Matter Physics

Cite this

Sputter deposited Cr–Si–O Cermet Films by XPS. / Bertóti, I.; Tóth, A.; Mohai, M.

In: Surface Science Spectra, Vol. 3, No. 2, 1994, p. 105-111.

Research output: Contribution to journalArticle

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