Special issue on "current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012

Mircea Modreanu, Olivier Durand, Gerald E. Jellison, Giancarlo Salviati, M. Fried

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1-2
Number of pages2
JournalThin Solid Films
Volume541
DOIs
Publication statusPublished - Aug 31 2013

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France
metrology
trends
X rays
x rays

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Special issue on "current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012. / Modreanu, Mircea; Durand, Olivier; Jellison, Gerald E.; Salviati, Giancarlo; Fried, M.

In: Thin Solid Films, Vol. 541, 31.08.2013, p. 1-2.

Research output: Contribution to journalArticle

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