Some aspects of the thermal decomposition of InP surfaces

F. Riesz, L. Dobos, J. Karanyi, A. Tóth, C. Vignali, C. Pelosi, K. Rakennus, T. Hakkarainen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Thermal decomposition of bulk and heteroepitaxial InP surfaces is studied by scanning electron microscopy (SEM), atomic force microscopy and in-situ SEM and mass spectrometry. Correlation is established between the evaporation of phosphorous and the formation of thermal etch pits. Only negligible roughening is induced by annealing outside the pits.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Pages352-355
Number of pages4
Volume3316
Edition1
Publication statusPublished - 1998
EventProceedings of the 1997 9th International Workshop on the Physics of Semiconductor Devices, IWPSD. Part 1 (of 2) - Delhi, India
Duration: Dec 16 1997Dec 20 1997

Other

OtherProceedings of the 1997 9th International Workshop on the Physics of Semiconductor Devices, IWPSD. Part 1 (of 2)
CityDelhi, India
Period12/16/9712/20/97

Fingerprint

thermal decomposition
Pyrolysis
Scanning electron microscopy
scanning electron microscopy
electron mass
Mass spectrometry
Atomic force microscopy
Evaporation
mass spectroscopy
evaporation
atomic force microscopy
Annealing
annealing
Hot Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Riesz, F., Dobos, L., Karanyi, J., Tóth, A., Vignali, C., Pelosi, C., ... Hakkarainen, T. (1998). Some aspects of the thermal decomposition of InP surfaces. In Proceedings of SPIE - The International Society for Optical Engineering (1 ed., Vol. 3316, pp. 352-355). SPIE.

Some aspects of the thermal decomposition of InP surfaces. / Riesz, F.; Dobos, L.; Karanyi, J.; Tóth, A.; Vignali, C.; Pelosi, C.; Rakennus, K.; Hakkarainen, T.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3316 1. ed. SPIE, 1998. p. 352-355.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Riesz, F, Dobos, L, Karanyi, J, Tóth, A, Vignali, C, Pelosi, C, Rakennus, K & Hakkarainen, T 1998, Some aspects of the thermal decomposition of InP surfaces. in Proceedings of SPIE - The International Society for Optical Engineering. 1 edn, vol. 3316, SPIE, pp. 352-355, Proceedings of the 1997 9th International Workshop on the Physics of Semiconductor Devices, IWPSD. Part 1 (of 2), Delhi, India, 12/16/97.
Riesz F, Dobos L, Karanyi J, Tóth A, Vignali C, Pelosi C et al. Some aspects of the thermal decomposition of InP surfaces. In Proceedings of SPIE - The International Society for Optical Engineering. 1 ed. Vol. 3316. SPIE. 1998. p. 352-355
Riesz, F. ; Dobos, L. ; Karanyi, J. ; Tóth, A. ; Vignali, C. ; Pelosi, C. ; Rakennus, K. ; Hakkarainen, T. / Some aspects of the thermal decomposition of InP surfaces. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3316 1. ed. SPIE, 1998. pp. 352-355
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