Soft X-ray plasma source pumped by an excimer laser: Optimization and applications

Patrizia Albertano, Mauro Belli, Sarah Bollanti, Paolo Di Lazzaro, Anatoly Ya Faenov, Francesco Flora, Gualtiero Giordano, Antonio Grilli, Fiorenza Ianzini, S. Kukhlevsky, Tommaso Letardi, Alessandro Marinai, Alessandro Nottola, Libero Palladino, Tatiana Pikuz

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

A large volume excimer laser, HERCULES, has been successfully applied as pump for a soft X-ray plasma source. The laser pulse duration has been varied from the natural value of 120 ns down to 10 ns, reaching different emission spectra from the plasma which have resulted to be optimum for different applications of the plasma source itself. Some experimental results on the applications of the source to different fields (X-ray microscopy, radio-biology, X-ray micro-lithography, basic plasma physics research) are presented; the choice of the best laser parameters in relation to the applications of the plasma source are also discussed.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages138-151
Number of pages14
Volume3683
Publication statusPublished - 1999
EventProceedings of the 1998 Laser Optics '98: Solid State Lasers - St. Petersburg, RUS
Duration: Jun 22 1998Jun 26 1998

Other

OtherProceedings of the 1998 Laser Optics '98: Solid State Lasers
CitySt. Petersburg, RUS
Period6/22/986/26/98

Fingerprint

Plasma sources
Excimer lasers
excimer lasers
X rays
optimization
Plasmas
x rays
Lithography
Laser pulses
plasma physics
Microscopic examination
Physics
biology
Pumps
lasers
pulse duration
emission spectra
lithography
Lasers
pumps

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Albertano, P., Belli, M., Bollanti, S., Di Lazzaro, P., Ya Faenov, A., Flora, F., ... Pikuz, T. (1999). Soft X-ray plasma source pumped by an excimer laser: Optimization and applications. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3683, pp. 138-151). Society of Photo-Optical Instrumentation Engineers.

Soft X-ray plasma source pumped by an excimer laser : Optimization and applications. / Albertano, Patrizia; Belli, Mauro; Bollanti, Sarah; Di Lazzaro, Paolo; Ya Faenov, Anatoly; Flora, Francesco; Giordano, Gualtiero; Grilli, Antonio; Ianzini, Fiorenza; Kukhlevsky, S.; Letardi, Tommaso; Marinai, Alessandro; Nottola, Alessandro; Palladino, Libero; Pikuz, Tatiana.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3683 Society of Photo-Optical Instrumentation Engineers, 1999. p. 138-151.

Research output: Chapter in Book/Report/Conference proceedingChapter

Albertano, P, Belli, M, Bollanti, S, Di Lazzaro, P, Ya Faenov, A, Flora, F, Giordano, G, Grilli, A, Ianzini, F, Kukhlevsky, S, Letardi, T, Marinai, A, Nottola, A, Palladino, L & Pikuz, T 1999, Soft X-ray plasma source pumped by an excimer laser: Optimization and applications. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3683, Society of Photo-Optical Instrumentation Engineers, pp. 138-151, Proceedings of the 1998 Laser Optics '98: Solid State Lasers, St. Petersburg, RUS, 6/22/98.
Albertano P, Belli M, Bollanti S, Di Lazzaro P, Ya Faenov A, Flora F et al. Soft X-ray plasma source pumped by an excimer laser: Optimization and applications. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3683. Society of Photo-Optical Instrumentation Engineers. 1999. p. 138-151
Albertano, Patrizia ; Belli, Mauro ; Bollanti, Sarah ; Di Lazzaro, Paolo ; Ya Faenov, Anatoly ; Flora, Francesco ; Giordano, Gualtiero ; Grilli, Antonio ; Ianzini, Fiorenza ; Kukhlevsky, S. ; Letardi, Tommaso ; Marinai, Alessandro ; Nottola, Alessandro ; Palladino, Libero ; Pikuz, Tatiana. / Soft X-ray plasma source pumped by an excimer laser : Optimization and applications. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3683 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 138-151
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AU - Ya Faenov, Anatoly

AU - Flora, Francesco

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