Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

B. Bruneau, I. Korolov, T. Lafleur, T. Gans, D. O'Connell, A. Greb, A. Derzsi, Z. Donkó, S. Brandt, E. Schüngel, J. Schulze, E. Johnson, J. P. Booth

Research output: Contribution to journalArticle

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Abstract

We report investigations of capacitively coupled carbon tetrafluoride (CF4) plasmas excited with tailored voltage waveforms containing up to five harmonics of a base frequency of 5.5 MHz. The impact of both the slope asymmetry, and the amplitude asymmetry, of these waveforms on the discharge is examined by combining experiments with particle-in-cell simulations. For all conditions studied herein, the discharge is shown to operate in the drift-ambipolar mode, where a comparatively large electric field in the plasma bulk (outside the sheaths) is the main mechanism for electron power absorption leading to ionization. We show that both types of waveform asymmetries strongly influence the ion energy at the electrodes, with the particularity of having the highest ion flux on the electrode where the lowest ion energy is observed. Even at the comparatively high pressure (600 mTorr) and low fundamental frequency of 5.5 MHz used here, tailoring the voltage waveforms is shown to efficiently create an asymmetry of both the ion energy and the ion flux in geometrically symmetric reactors.

Original languageEnglish
Article number163301
JournalJournal of Applied Physics
Volume119
Issue number16
DOIs
Publication statusPublished - Apr 28 2016

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carbon tetrafluoride
asymmetry
slopes
low frequencies
waveforms
ions
electrodes
electric potential
sheaths
energy
reactors
harmonics
ionization
electric fields
cells
electrons
simulation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas. / Bruneau, B.; Korolov, I.; Lafleur, T.; Gans, T.; O'Connell, D.; Greb, A.; Derzsi, A.; Donkó, Z.; Brandt, S.; Schüngel, E.; Schulze, J.; Johnson, E.; Booth, J. P.

In: Journal of Applied Physics, Vol. 119, No. 16, 163301, 28.04.2016.

Research output: Contribution to journalArticle

Bruneau, B, Korolov, I, Lafleur, T, Gans, T, O'Connell, D, Greb, A, Derzsi, A, Donkó, Z, Brandt, S, Schüngel, E, Schulze, J, Johnson, E & Booth, JP 2016, 'Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas', Journal of Applied Physics, vol. 119, no. 16, 163301. https://doi.org/10.1063/1.4947453
Bruneau, B. ; Korolov, I. ; Lafleur, T. ; Gans, T. ; O'Connell, D. ; Greb, A. ; Derzsi, A. ; Donkó, Z. ; Brandt, S. ; Schüngel, E. ; Schulze, J. ; Johnson, E. ; Booth, J. P. / Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas. In: Journal of Applied Physics. 2016 ; Vol. 119, No. 16.
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