Slab optical waveguides in Er3-doped tellurite glass by N + ion implantation at 1.5 MeV

Simone Berneschi, Massimo Brenci, Gualtiero Nunzi Conti, Stefano Pelli, Marco Bettinelli, Adolfo Speghini, Istvan Bnysz, Mikls Fried, Nguyen Q. Khanh, Tivadar Lohner, Péter Petrik, Andrea Watterich, Zsolt Zolnai

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6 Citations (Scopus)


Slab optical waveguides were fabricated in tung-sten-tellurite glass doped with Er3 ions by means of nitrogen ion implantation at 1.5 MeV. A wide range of ion doses (from 51012 to 8.1016 ionscm 2) was used. Optical characterization, performed by dark-line spectroscopy, revealed that the waveguides were of optical barrier type: the implanted layer exhibited a decrease of the refractive index with respect to the virgin bulk glass, while the region comprised between the sample surface and the end of the ion track acted as an optical guiding structure. It was also demonstrated that a post-implantation annealing process, performed at various temperatures on the samples implanted at higher doses, contributes to the reduction of the barrier region.

Original languageEnglish
Article number071110
JournalOptical Engineering
Issue number7
Publication statusPublished - Jul 1 2011


  • Er-doped glass
  • Er-doped waveguide amplifier
  • Ion implantation
  • Slab waveguides
  • Tellurite glass

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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    Berneschi, S., Brenci, M., Nunzi Conti, G., Pelli, S., Bettinelli, M., Speghini, A., Bnysz, I., Fried, M., Khanh, N. Q., Lohner, T., Petrik, P., Watterich, A., & Zolnai, Z. (2011). Slab optical waveguides in Er3-doped tellurite glass by N + ion implantation at 1.5 MeV. Optical Engineering, 50(7), [071110].