Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation

Lars Landström, Mats Boman, P. Heszler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Two different laser techniques for producing tungsten-based nanoparticles have been compared in this investigation. The particles were produced by Laser assisted Chemical Vapor Deposition (LCVD) from WF6/H2/Ar gas mixtures, and by Pulsed Laser Ablation (PLA) of a solid W target in N2 atmosphere, respectively. An ArF excimer laser (λ = 193 nm) was used as the light source for both methods. The ablation was performed at atmospheric pressure which allowed for direct size-distribution determination by a Differential Mobility Analyzer (DMA), and a subsequent deposition of size-selected monodisperse particles. The deposits were characterized by using TEM. SEM, XRD, and XPS techniques. Optical emission spectroscopy was capable of monitoring the temperature of the particles by measuring the emitted thermal radiation from the laser-excited nanoparticles during LCVD. Strong evaporation, due to high temperature of the particles, affects the size-distribution as the laser fluence is increased. Coagulation widens and alters the size-distribution as the partial pressure of WF6 is increased; according to TEM analysis of the deposits. Lognormal distribution was found at low WF6 partial pressures. However, laser ablation at fluences below the ablation threshold yielded a non-lognormal size-distribution with a continuous decreasing occurrence as the particle diameter increased in the observed size-window (7-133 nm in diameter). Crystalline (Β-phase) particles could be formed by LCVD, but only amorphous WNx (x ∼ 0.3) particles were obtained by PLA in a N2 ambient. The differences in size-distributions and crystallinity for LCVD- and PLA-produced particles are discussed on a basis that diverse mechanisms lead to particle formation.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsN.J. Halas
Pages47-57
Number of pages11
Volume4810
DOIs
Publication statusPublished - 2002
EventProperties of Metal Nanostructures - Seattle, WA, United States
Duration: Jul 10 2002Jul 11 2002

Other

OtherProperties of Metal Nanostructures
CountryUnited States
CitySeattle, WA
Period7/10/027/11/02

Fingerprint

Laser ablation
Pulsed lasers
laser ablation
Tungsten
Chemical vapor deposition
pulsed lasers
tungsten
vapor deposition
Nanoparticles
nanoparticles
Lasers
lasers
Ablation
Partial pressure
Deposits
ablation
partial pressure
Transmission electron microscopy
fluence
Optical emission spectroscopy

Keywords

  • Ablation
  • DMA
  • LCVD
  • Size-distribution
  • Tungsten nanoparticles

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Landström, L., Boman, M., & Heszler, P. (2002). Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation. In N. J. Halas (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4810, pp. 47-57) https://doi.org/10.1117/12.451578

Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation. / Landström, Lars; Boman, Mats; Heszler, P.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / N.J. Halas. Vol. 4810 2002. p. 47-57.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Landström, L, Boman, M & Heszler, P 2002, Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation. in NJ Halas (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4810, pp. 47-57, Properties of Metal Nanostructures, Seattle, WA, United States, 7/10/02. https://doi.org/10.1117/12.451578
Landström L, Boman M, Heszler P. Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation. In Halas NJ, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4810. 2002. p. 47-57 https://doi.org/10.1117/12.451578
Landström, Lars ; Boman, Mats ; Heszler, P. / Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation. Proceedings of SPIE - The International Society for Optical Engineering. editor / N.J. Halas. Vol. 4810 2002. pp. 47-57
@inproceedings{a2a813bc8f1f4d96b696d2da56430373,
title = "Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation",
abstract = "Two different laser techniques for producing tungsten-based nanoparticles have been compared in this investigation. The particles were produced by Laser assisted Chemical Vapor Deposition (LCVD) from WF6/H2/Ar gas mixtures, and by Pulsed Laser Ablation (PLA) of a solid W target in N2 atmosphere, respectively. An ArF excimer laser (λ = 193 nm) was used as the light source for both methods. The ablation was performed at atmospheric pressure which allowed for direct size-distribution determination by a Differential Mobility Analyzer (DMA), and a subsequent deposition of size-selected monodisperse particles. The deposits were characterized by using TEM. SEM, XRD, and XPS techniques. Optical emission spectroscopy was capable of monitoring the temperature of the particles by measuring the emitted thermal radiation from the laser-excited nanoparticles during LCVD. Strong evaporation, due to high temperature of the particles, affects the size-distribution as the laser fluence is increased. Coagulation widens and alters the size-distribution as the partial pressure of WF6 is increased; according to TEM analysis of the deposits. Lognormal distribution was found at low WF6 partial pressures. However, laser ablation at fluences below the ablation threshold yielded a non-lognormal size-distribution with a continuous decreasing occurrence as the particle diameter increased in the observed size-window (7-133 nm in diameter). Crystalline (Β-phase) particles could be formed by LCVD, but only amorphous WNx (x ∼ 0.3) particles were obtained by PLA in a N2 ambient. The differences in size-distributions and crystallinity for LCVD- and PLA-produced particles are discussed on a basis that diverse mechanisms lead to particle formation.",
keywords = "Ablation, DMA, LCVD, Size-distribution, Tungsten nanoparticles",
author = "Lars Landstr{\"o}m and Mats Boman and P. Heszler",
year = "2002",
doi = "10.1117/12.451578",
language = "English",
volume = "4810",
pages = "47--57",
editor = "N.J. Halas",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Size-distribution and characterization of tungsten nanoparticles generated by laser assisted chemical vapor deposition and pulsed laser ablation

AU - Landström, Lars

AU - Boman, Mats

AU - Heszler, P.

PY - 2002

Y1 - 2002

N2 - Two different laser techniques for producing tungsten-based nanoparticles have been compared in this investigation. The particles were produced by Laser assisted Chemical Vapor Deposition (LCVD) from WF6/H2/Ar gas mixtures, and by Pulsed Laser Ablation (PLA) of a solid W target in N2 atmosphere, respectively. An ArF excimer laser (λ = 193 nm) was used as the light source for both methods. The ablation was performed at atmospheric pressure which allowed for direct size-distribution determination by a Differential Mobility Analyzer (DMA), and a subsequent deposition of size-selected monodisperse particles. The deposits were characterized by using TEM. SEM, XRD, and XPS techniques. Optical emission spectroscopy was capable of monitoring the temperature of the particles by measuring the emitted thermal radiation from the laser-excited nanoparticles during LCVD. Strong evaporation, due to high temperature of the particles, affects the size-distribution as the laser fluence is increased. Coagulation widens and alters the size-distribution as the partial pressure of WF6 is increased; according to TEM analysis of the deposits. Lognormal distribution was found at low WF6 partial pressures. However, laser ablation at fluences below the ablation threshold yielded a non-lognormal size-distribution with a continuous decreasing occurrence as the particle diameter increased in the observed size-window (7-133 nm in diameter). Crystalline (Β-phase) particles could be formed by LCVD, but only amorphous WNx (x ∼ 0.3) particles were obtained by PLA in a N2 ambient. The differences in size-distributions and crystallinity for LCVD- and PLA-produced particles are discussed on a basis that diverse mechanisms lead to particle formation.

AB - Two different laser techniques for producing tungsten-based nanoparticles have been compared in this investigation. The particles were produced by Laser assisted Chemical Vapor Deposition (LCVD) from WF6/H2/Ar gas mixtures, and by Pulsed Laser Ablation (PLA) of a solid W target in N2 atmosphere, respectively. An ArF excimer laser (λ = 193 nm) was used as the light source for both methods. The ablation was performed at atmospheric pressure which allowed for direct size-distribution determination by a Differential Mobility Analyzer (DMA), and a subsequent deposition of size-selected monodisperse particles. The deposits were characterized by using TEM. SEM, XRD, and XPS techniques. Optical emission spectroscopy was capable of monitoring the temperature of the particles by measuring the emitted thermal radiation from the laser-excited nanoparticles during LCVD. Strong evaporation, due to high temperature of the particles, affects the size-distribution as the laser fluence is increased. Coagulation widens and alters the size-distribution as the partial pressure of WF6 is increased; according to TEM analysis of the deposits. Lognormal distribution was found at low WF6 partial pressures. However, laser ablation at fluences below the ablation threshold yielded a non-lognormal size-distribution with a continuous decreasing occurrence as the particle diameter increased in the observed size-window (7-133 nm in diameter). Crystalline (Β-phase) particles could be formed by LCVD, but only amorphous WNx (x ∼ 0.3) particles were obtained by PLA in a N2 ambient. The differences in size-distributions and crystallinity for LCVD- and PLA-produced particles are discussed on a basis that diverse mechanisms lead to particle formation.

KW - Ablation

KW - DMA

KW - LCVD

KW - Size-distribution

KW - Tungsten nanoparticles

UR - http://www.scopus.com/inward/record.url?scp=0036983718&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036983718&partnerID=8YFLogxK

U2 - 10.1117/12.451578

DO - 10.1117/12.451578

M3 - Conference contribution

VL - 4810

SP - 47

EP - 57

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Halas, N.J.

ER -